Kyocera Corporation

Shuichi Iida

Hidehiro Takenoshita

Satoshi Toyoda

Mizuho Oota

Tatsuji Furuse

Hiroaki Seno

Toshiaki Shigeoka

Mami Iida

Kouki Okayama

A corrosion-resistant member according to the present disclosure includes a substrate that is composed of an aluminum-oxide-based ceramic and a covering layer that is composed of an O&#x2014;Al&#x2014;C layer that is located on the substrate.

Corrosion-resistant member

A corrosion-resistant member may include alumina ceramics containing &#x3b1;-alumina and anorthite. The alumina ceramics may contain 0.4% by mass or more of Ca and Si in total in terms of CaO and SiO, respectively, and a mass ratio of CaO/SiOmay fall within a range of 0.5 to 2. Moreover, a ratio B/A of X-ray diffraction peak intensity B for (004) plane of the anorthite to X-ray diffraction peak intensity A for (104) plane of the &#x3b1;-alumina in a surface of the alumina ceramics, may be 0.01 or more.

A cordierite sintered body and a member for semiconductor manufacturing apparatus are disclosed. The cordierite sintered body includes a crystal phase and an amorphous phase. The crystal phase includes a main crystal phase that essentially consists of cordierite crystal grains; and a sub crystal phase that includes sub crystal grains containing alumina, mullite or sapphirine. The amorphous phase contains calcium and is located at grain boundaries of the cordierite crystal grains and the sub crystal grains. A crystal phase proportion of the main crystal phase to the crystal phase (or total of the main crystal phase and the sub crystal phase) is 95% to 97.5% by mass or less. A crystal phase proportion of the sub crystal phase to the crystal phase is 2.5% to 5% by mass or less. The sintered body contains calcium by 0.4% to 0.6% by mass or less in terms of CaO.

Cordierite sintered body and member for semiconductor device composed of cordierite sintered body

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Kirishima, Japan

Shuichi Iida