Denki Kagaku Kogyo Kabushiki Kaisha

Shuichi Hirai

Nobuyuki Yoshino

Noriaki Yamagata

A method of producing recording media which comprises steps of arranging substrates for recording media on a carrier which is purified by etching with a plasma state gas; and forming a plurality of sputtered layers on the substrates. An apparatus for producing recording media which comprises a sputtering chamber which forms a recording layer; and a treatment chamber which precedes the sputtering chamber, and in which a carrier to be arranged with substrates for the recording media is purified by a plasma state gas.

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Machida, Japan

Shuichi Hirai