Taiwan Semiconductor Manufacturing Comp. Ltd.

TSMC China Company Limited

Shui-Ming Cheng

Ka-Hing Fung

Wun-Jie Lin

Yu-Ti Su

Ming-Hsiang Song

Hung-Wei Chen

Han-Jen Yang

Zhong Tang Xuan

Yin-Pin Wang

Ming-Fang Lai

Hang Fan

Kuan-Lun Cheng

Yi-Ming Sheu

Yu-Chang Jong

Sun-Jay Chang

Hao-Yu Chen

Huan-Tsung Huang

Jing-Ying Chen

Sheng-Da Liu

Kuan Lun Cheng

Kaun-Lun Cheng

Yu-Yuan Yao

A device includes an electrostatic discharge (ESD) protection switch and an ESD driver. The ESD driver is configured to receive a first voltage at a first terminal and receive a second voltage at a second terminal and includes a first trigger circuit and a first resistor. The first trigger circuit includes a first input terminal and a first output terminal. The first input terminal is configured to receive the first voltage. The first resistor is coupled between the first output terminal and the second terminal. When the first voltage received at the first terminal is a first overvoltage and a voltage difference between the first voltage and the second voltage is higher than a first voltage threshold, the ESD driver outputs a first trigger signal to turn on the ESD protection switch.

Device and method for electrostatic discharge protection

A device is disclosed herein. The device includes an electrostatic discharge (ESD) protection switch and an ESD driver. The ESD driver is configured to receive a first voltage and a second voltage. When a voltage difference between the first voltage and the second voltage is higher than a first voltage threshold, the ESD driver outputs a first trigger signal to turn on the ESD protection switch. When the voltage difference between the first voltage and the second voltage is lower than a second voltage threshold, the ESD driver outputs a second trigger signal to turn on the ESD protection switch.

An Electro-Static Discharge (ESD) protection circuit includes a plurality of groups of p-type heavily doped semiconductor strips (p+ strips) and a plurality of groups of n-type heavily doped semiconductor strips (n+ strips) forming an array having a plurality of rows and columns. In each of the rows and the columns, the plurality of groups of p+ strips and the plurality of groups of n+ strips are allocated in an alternating layout. The ESD protection circuit further includes a plurality of gate stacks, each including a first edge aligned to an edge of a group in the plurality of groups of p+ strips, and a second edge aligned to an edge of a group in the plurality of groups of n+ strips.

SCRs with checker board layouts

In some embodiments, a BJT structure includes a base region, an emitter region formed in the base region and including an emitter doping region, a collector region including a collector doping region, an insulating structure and a field plate. The base region forms a junction with the collector region between the emitter and collector doping regions. The field plate is formed over an insulating structure over the junction. A first distance between the corresponding emitter and collector doping regions to the junction is shorter than a second distance in another BJT structure without the field plate corresponding to the first distance. The first distance causes a breakdown of the junction corresponding to a first breakdown voltage value between the emitter and collector doping regions being substantially the same or greater than a second breakdown voltage value of the other BJT structure corresponding to the first breakdown voltage value.

Transistor structure with field plate for reducing area thereof

A semiconductor device includes a substrate, a first device situated on the substrate, the first device including a source and a drain each situated extending a first depth within the substrate, and a second device situated on the substrate, the second device including a source and a drain each situated extending a second depth within the substrate, the second depth not equal to the first depth.

Method for manufacturing a semiconductor device with reduced floating body effect

A method comprises forming a first semiconductor device in a substrate, where the first semiconductor device comprises a gate structure, a spacer disposed on sidewalls of the gate structure, the spacer having a first thickness, and raised source and drain regions disposed on either side of the gate structure. The method further comprises forming a second semiconductor device in the substrate and electrically isolated from the first semiconductor device, where the second semiconductor device comprises a gate structure, a spacer disposed on sidewalls of the gate structure, the spacer having a second thickness less than the first thickness of the spacer of the first semiconductor device, and recessed source and drain regions disposed on either side of the gate structure.

Semiconductor device having high drive current and method of manufacture therefor

A diffusion layer for semiconductor devices is provided. In accordance with embodiments of the present invention, a semiconductor device, such as a transistor, comprises doped regions surrounded by a diffusion barrier. The diffusion barrier may be formed by recessing regions of the substrate and implanting fluorine or carbon ions. A silicon layer may be epitaxially grown over the diffusion barrier in the recessed regions. Thereafter, the recessed regions may be filled and doped with a semiconductor or semiconductor alloy material. In an embodiment, a semiconductor alloy material, such as silicon carbon, is selected to induce a tensile stress in the channel region for an NMOS device, and a semiconductor alloy material, such as silicon germanium, is selected to induce a compressive stress in the channel region for a PMOS device.

Diffusion layer for stressed semiconductor devices

A semiconductor device including an isolation region located in a substrate, an NMOS device located partially over a surface of the substrate, and a PMOS device isolated from the NMOS device by the isolation region and located partially over the surface. A first one of the NMOS and PMOS devices includes one of: (1) first source/drain regions recessed within the surface; and (2) first source/drain regions extending from the surface. A second one of the NMOS and PMOS devices includes one of: (1) second source/drain regions recessed within the surface wherein the first source/drain regions extend from the surface; (2) second source/drain regions extending from the surface wherein the first source/drain regions are recessed within the surface; and (3) second source/drain regions substantially coplanar with the surface.

An SOI device () has a gate electrode with one or more additional gate regions (), and oxygen or halogen ions () under the additional gate regions (). The oxygen or halogen ions () form thicker gate oxide regions or shallow trench isolation regions.

Body contact formation in partially depleted silicon on insulator device

A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a gate dielectric over a substrate, a gate electrode over the gate dielectric, a slim gate spacer along a side of the gate electrode, and a source/drain region substantially aligned with an edge of the slim gate spacer. The source/drain region includes a first implantation region having an overlap with the gate electrode, a second implantation region further away from the channel region than the first implantation region, and a third implantation region further away from the channel region than the second implantation region. The source/drain region preferably further comprises an epitaxy region spaced apart from the slim gate spacer.

CMOS transistor with high drive current and low sheet resistance

A method of forming a source/drain having a reduced junction capacitance and a transistor employing the same. In one embodiment, the method of forming the source/drain includes forming a recess in a substrate adjacent a gate of the transistor and forming a deep doped region below a bottom surface of the recess. The method also includes epitaxially growing a semiconductor material within the recess and forming a lightly doped drain region adjacent the gate.

Method of forming a source/drain and a transistor employing the same

A strained channel MOSFET device with improved charge carrier mobility and method for forming the same, the method including providing a first and second FET device having a respective first polarity and second polarity opposite the first polarity on a substrate; forming a strained layer having a stress selected from the group consisting of compressive and tensile on the first and second FET devices; and, removing a thickness portion of the strained layer over one of the first and second FET devices to improve charge carrier mobility.

Growing community of inventors

Hsin-Chu, Taiwan

Shui-Ming Cheng