Sumitomo Heavy Industries, Ltd.

Shuhei Gotanda

Kakeru Takahashi

Takahiro Nakanishi

A cryopump includes: a cryopump container including a container body defining a cryopump intake port and extending axially and tubularly from the cryopump intake port, and a cryocooler accommodation cylinder connected to a side portion of the container body and extending transversely; a cryocooler fixed to the cryocooler accommodation cylinder and extending transversely within the cryopump container; a plurality of cryopanels thermally coupled to the second cooling stage of the cryocooler, capable of adsorbing a non-condensable gas, and axially arranged between the cryopump intake port and a bottom portion of the container body; and a purge gas inlet installed in the container body below the cryocooler accommodation cylinder to blow a purge gas to a distal portion of at least one of the cryopanels.

Cryopump

A cryopump system includes a plurality of cryopumps, each cryopump including a rough valve connecting the cryopump to a common rough pump and a pressure sensor measuring a pressure in the cryopump, and a controller that controls, for each cryopump, the rough valve based on a measured pressure from the pressure sensor such that the cryopump is decompressed to a first reference pressure by the common rough pump and thereafter a vacuum is maintained in the cryopump, and the cryopump is further decompressed to a second reference pressure lower than the first reference pressure by the common rough pump. The controller is configured to, based on the measured pressure from the pressure sensor of a first cryopump, open the rough valve of a second cryopump such that the second cryopump is decompressed to the first reference pressure while the vacuum is maintained in the first cryopump.

Cryopump system, and control device and regeneration method for cryopump system

A cryopump includes: a cryocooler which includes a high-temperature cooling stage and a low-temperature cooling stage; a radiation shield which surrounds the low-temperature cooling stage, extends in an axial direction, and is thermally coupled to the high-temperature cooling stage; a plurality of adsorption cryopanels which are disposed between a cryopump intake port and the low-temperature cooling stage in the axial direction and are thermally coupled to the low-temperature cooling stage; and a condensation cryopanel which is disposed between the radiation shield and the plurality of adsorption cryopanels in a radial direction, is thermally coupled to the low-temperature cooling stage, and has a tubular shape extending in the axial direction and being open at both ends.

Growing community of inventors

Tokyo, Japan

Shuhei Gotanda