Ebara Corporation

Shugo Midorikawa

Hideki Wakabayashi

Tensei Sato

Kazuma Ideguchi

Yosuke Nagasawa

Provided is a technique configured to cause a first actual operation to be started in a short time when the actual operation of a substrate processing component group is performed a plurality of times. A substrate processing systemincludes a substrate processing apparatushaving a substrate processing component groupand a controller. The substrate processing component groupis configured to perform a test operation and an actual operation. The substrate processing component grouphas a first substrate processing component and a second substrate processing component. When the actual operation is performed a plurality of times, the controllercauses the first substrate processing component to perform the test operation and causes the actual operation of the first substrate processing component to be started after completion of the test operation of the first substrate processing component.

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Tokyo, Japan

Shugo Midorikawa