Shanghai Micro Electronics Equipment (group) Co., Ltd.

Shucun Zhu

Wen Han Luo

Chang Jin Zhou

Xuchao Zhou

Liandong Pan

A photo-alignment control method and a photo-alignment apparatus are disclosed. In the photo-alignment control method, a yaw angle of a motion stage () relative to a polarizing illumination device () is detected to derive a weighted dynamic polarization angle deviation of a substrate (), so that a rotational angle of a rotary table () for rotating a substrate () is controlled, thereby effectively improving a control accuracy of a polarization angle in the photo-alignment process and further to ensure an accuracy of an alignment angle formed in an alignment film.

Light alignment control method and light alignment device

A dual-layer alignment apparatus is disclosed which includes: a fixed frame () and, disposed thereon, a first measuring device () and a mark plate (), the mark plate () having a fixed-frame mark (); and a motion stage () and, disposed thereon, a reference mark (), a motion-stage mark () and a second measuring device (). The first measuring device () is configured to measure a relative positional relationship between the reference mark () and the motion-stage mark (), the second measuring device () is configured to measure a relative positional relationship between the reference mark () and the fixed-frame mark (), from which a final relative positional relationship between the motion-stage mark () and the fixed-frame mark () is derived, based on which the motion stage () is displaced to a target location. A corresponding dual-layer alignment method is also disclosed. In the apparatus, the motion stage () is the only movable component. Additionally, coordinate relationships can be calibrated in a static manner in order to immunize calibration accuracy from positioning accuracy of the motion stage (), such that the alignment accuracy is improved. Further, a dual- or multi-lens design can be employed to allow additional improvements in flexibility and alignment efficiency.

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Shanghai, China

Shucun Zhu