East China Normal University

Chongqing Institute of East China Normal University

University of Shanghai for Science and Technology

Roi Optoelectronics Technology Co, Ltd.

Shanghai Langyan Optoelectronics Technology Co., Ltd.

Shuai Yuan

Heping Zeng

Mengyun Hu

Chuan Yang

Yong Wang

Hui Xu

Yanying Ma

Jue Yu

Yuan Nie

Yingsheng Du

Jin Wang

A method for processing a chip based on deep learning and an apparatus for processing a chip based on deep learning are provided. The method includes scanning the chip with femtosecond laser in a predetermined polarization state to produce a main scanning trajectory and periodic nano-stripes on both sides of the main scanning trajectory, so as to form a nano-ridge structure on a surface of the chip; obtaining a super-resolution microscopic image of the nano-ridge structure by super-resolution microscopy; obtaining a target image; reconstructing the target image based on deep learning for image super-resolution to obtain the reconstructed image, and recognizing and processing the reconstructed image to obtain characteristic parameters of the nano-ridge structure as input parameters for deep learning for femtosecond laser processing; adjusting processing parameters of the chip according to the output values of the deep learning model for femtosecond laser processing; and outputting the optimized nano-ridge structure.

Method and apparatus for processing chip based on deep learning

A method for processing a micro-channel of a micro-fluidic chip using multi-focus ultrafast laser, in which an array-type multi-focus femtosecond laser is used to perform fractional ablation on the micro-fluidic chip, and then pulse laser is used to perform secondary ablation on the micro-fluidic chip. Ultrasonic-assisted hydrofluoric acid etching is performed on the micro-fluidic chip after ablation to obtain a true three-dimensional micro-channel on the micro-fluidic chip. A device for processing a micro-channel of a micro-fluidic chip using multi-focus ultrafast laser is also provided.

Device and method for processing micro-channel on microfluidic chip using multi-focus ultrafast laser

A device and a method for direct printing of a microfluidic chip based on a large-format array femtosecond laser. The large-format array femtosecond laser with multi-parameter adjustable laser beam state is used to achieve large-format laser interference. The interference state, interference combination and exposure mode of the large-format array femtosecond laser are regulated, and multiple exposures are superimposed to output the desired pattern for the microfluidic chip, enabling the direct printing processing of the microfluidic chip.

Device and method for direct printing of microfluidic chip based on large-format array femtosecond laser

The present disclosure provides a stealth dicing method and apparatus. With the method, the focusing element focuses the laser beam on the surface of material to be diced, and the dynamic-equilibrium plasma channel is formed in the material to be diced by means of self-focusing and defocusing effect of plasma generated by ionizing the material to be diced. The modified layer may be formed in the material to be diced throughout the plasma channel, so as to realize stealth dicing.

Stealth dicing method including filamentation and apparatus thereof

Growing community of inventors

Chongqing, China

Shuai Yuan