Hon Hai Precision Industry Co., Ltd.

Tsinghua University

Shuai-Ping Ge

Shou-Shan Fan

Liang Liu

Pi-Jin Chen

Bing-Chu Du

Cai-Lin Guo

Zhao-Fu Hu

Peng Liu

Jie Tang

A reference leak () includes a first substrate (), a second substrate () disposed and bonded on the first substrate, and predetermined numbers of leak channels () defined in at least one of the first and second substrates. Oblique walls of the leak channels are formed by crystal planes of the at least one of the first and second substrates, the oblique walls thereby being aligned according to such crystal planes. A method for making a reference leak is also provided.

Reference leak

A method for making a reference leak includes the steps of: (a) preparing a substrate; (b) forming a patterned catalyst layer on the substrate, the patterned catalyst layer comprising one or more catalyst blocks; (c) forming one or more elongate nano-structures extending from the corresponding catalyst blocks by a chemical vapor deposition method; (d) forming a leak layer of one of a metallic material, a glass material, and a ceramic material on the substrate with the one or more elongate nano-structures partly or completely embedded therein; and (e) removing the one or more elongate nano-structures and the substrate to obtain a reference leak with one or more leak holes defined therein.

Process for manufacturing a reference leak

Growing community of inventors

Beijing, China

Shuai-Ping Ge