Hermes Microvision Inc.

Asml Netherlands B.v.

Focus E-beam Technology (beijing) Co., Ltd.

Boe Technology Group Co., Ltd.

Alibaba Group Holding Limited

Willand (beijing) Technology Co., Ltd.

Chengdu Boe Display Sci-tech Co., Ltd.

Beijing Aerospace Propulsion Institute

Beijing Aerospace Petrochemical Technology & Equipment Engineering Corporation Limited

Ningbo Focus-ebeam Instruments Inc.

China Petroleum Chemical Corporation

Research Institute of Petroleum Processing, Sinopec

Shuai Li

Zhongwei Chen

Wei He

Hang Li

Weiming Ren

Xuedong Liu

Juying Dou

Peng Wang

Lei Liu

Yongguang Zhang

Xuerang Hu

Jack Jau

Yang Gao

Joe Wang

Yuting Zhang

Qingpo Xi

Lei Qin

Xuebin Wang

Fumin He

Zhibin Wang

Jianrong Zhang

Zhuo Lv

Yong Zeng

Tianning Yu

Yufeng Bao

Shuai Wu

Rui Dai

Chunhong Li

Chao Zhong

Jianmin Lin

Kaikui Liu

Chenguang Ji

Shenkun Xu

Zhoushuo Chu

Yanxue Zhang

Yanru Guo

Zeyu Qu

Zhonglin Li

Weijie Tang

Limin Dai

Xiangyu Chen

Embodiments of the application provide a method for generating a working map, an operation method, a control method, and a related apparatus. The method for generating a working map includes the following operations. The automatic operation apparatus is controlled to move, to record position information of multiple path points on a movement path of the automatic operation apparatus. Boundary attribute configuration information is received, and boundary attributes of at least a part of the path points are determined according to the boundary attribute configuration information. A working map including position information of multiple boundary points and boundary attributes of at least a part of the boundary points is generated. The position information of multiple boundary points are determined according to the position information of multiple path points, the boundary attribute of the boundary point is determined according to the boundary attribute of the path point, multiple boundary points are configured to indicate a virtual boundary surrounding a preset area, and when the automatic operation apparatus performs operations along the virtual boundary, working modes when the automatic operation apparatus moves to boundary points corresponding to different boundary attributes are different. This solution may improve work efficiency of the automatic operation apparatus.

Method for generating working map, operation method, control method, and related apparatuses

A multi-beam apparatus for observing a sample with high resolution and high throughput and in flexibly varying observing conditions is proposed. The apparatus uses a movable collimating lens to flexibly vary the currents of the plural probe spots without influencing the intervals thereof, a new source-conversion unit to form the plural images of the single electron source and compensate off-axis aberrations of the plural probe spots with respect to observing conditions, and a pre-beamlet-forming means to reduce the strong Coulomb effect due to the primary-electron beam.

Apparatus of plural charged-particle beams

Provided is an electron beam system, including: an electron source, configured to generate an electron beam; a first beam guide, configured to accelerate the electron beam; a second beam guide, configured to accelerate the electron beam; a first control electrode arranged between the first beam guide and the second beam guide, configured to change movement directions of backscattered electrons and secondary electrons generated by the electron beam acting on a specimen to be tested; a first detector arranged between the first beam guide and the first control electrode, configured to receive the backscattered electrons generated by the electron beam acting on the specimen to be tested. The first control electrode according to the embodiments of the present disclosure changes the movement directions of the backscattered electrons and secondary electrons generated by the electron beam generated by the electron source acting on the specimen to be tested, so that the first detector arranged between the first beam guide and the first control electrode can receive pure backscattered electrons generated by the electron beam acting on the specimen to be tested.

Electron beam system

The device includes a beam source for generating an electron beam, a beam guiding tube passed through an objective lens, an objective lens for generating a magnetic field in the vicinity of the specimen to focus the particles of the particle beam on the specimen, a control electrode having a potential for providing a retarding field to the particle beam near the specimen to reduce the energy of the particle beam when the beam collides with the specimen, a deflection system including a plurality of deflection units situated along the optical axis for deflecting the particle beam to allow scanning on the specimen with large area, at least one of the deflection units located in the retarding field of the beam, the remainder of the deflection units located within the central bore of the objective lens, and a detection unit to capture secondary electron (SE) and backscattered electrons (BSE).

Objective lens system for fast scanning large FOV

An electron microscope includes: an electron source, which is configured to generate an electron beam; a first beam conduit, which is configured to accelerate the electron beam; a second beam conduit, which is configured to accelerate the electron beam; a first detector, which is disposed between the first beam conduit and the second beam conduit and configured to receive secondary electrons generated by the electron beam acting on a sample to be tested; and a control electrode, which is disposed between the first detector and an optical axis of the electron beam and configured to change the direction of movement of backscattered electrons and the secondary electrons generated by the electron beam acting on said sample.

Electron microscope

A method for predicting traffic flow or a travel time, includes: obtaining navigation route data; obtaining, according to the navigation route data, navigation flow of a road within a prediction time period; obtaining real-time traffic flow, a real-time travel time, past traffic flow, and a past travel time of the road; and training a neural network with the real-time travel time, the past travel time, the real-time traffic flow, the past traffic flow, and the navigation flow of the road to obtain predicted traffic flow or a predicted travel time of the road within the prediction time period.

Method and device for predicting traffic flow or travel time period

A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.

Provided is a curved liquid crystal display panel, including a color film substrate and an array substrate. An orthographic projection of the color film substrate on the array substrate is within the array substrate. The color film substrate includes a first side surface and a second side surface. The array substrate includes a third side surface and a fourth side surface. The first side surface is adjacent to and staggered from the third side surface. The second side surface is adjacent to and staggered from the fourth side surface. At positions where the third side surface and the fourth side surface are disposed, each of a side, proximal to the color film substrate, of the array substrate and a side, distal from the color film substrate, of the array substrate includes a structure formed by a grinding process.

Curved liquid crystal display panel and curved display device

A microscope includes: an electronic optical column configured to emit scanning electron beams; a specimen stage configured to place a specimen; a target movably disposed between the electronic optical column and the specimen stage; and a driving mechanism for driving the target to move between a first position and a second position, wherein the first position is a position at which the electron beams act on the specimen, and the second position is a position at which the electron beams act on the target to generate X-rays irradiating the specimen. In the present disclosure, through one time mounting of the specimen, the microscope enables the dual-function detection of the specimen, i.e., detection of the specimen by an SEM and detection of the specimen by a Nano-CT.

Microscope

One modified source-conversion unit and one method to reduce the Coulomb Effect in a multi-beam apparatus are proposed. In the modified source-conversion unit, the aberration-compensation function is carried out after the image-forming function has changed each beamlet to be on-axis locally, and therefore avoids undesired aberrations due to the beamlet tilting/shifting. A Coulomb-effect-reduction means with plural Coulomb-effect-reduction openings is placed close to the single electron source of the apparatus and therefore the electrons not in use can be cut off as early as possible.

An imaging system includes: a micro computed tomography (micro-CT) subsystem, a specimen processing subsystem, a scanning electron microscopy (SEM) and a processor. The micro-CT subsystem includes an X-ray source and an X-ray detector, and is configured to acquire a three-dimensional image of a specimen. The specimen processing subsystem includes a focused ion beam subsystem and a mechanical cutting device. The focused ion beam subsystem is configured to process the specimen in a first processing manner, and the mechanical cutting device is configured to process the specimen in a second processing manner to obtain a target section of a target area. The SEM is located above the specimen and is configured to acquire a two-dimensional image of the target section. The processor is configured to perform three-dimensional reconstruction on the two-dimensional images to obtain a three-dimensional imaging of the specimen.

Imaging system and method for specimen detection

A fast blind plate switching device, comprising a sealing structure, a clamping structure, a support structure and an execution mechanism. The blind plate has an open-state structure and a blind-state structure. The support structure is used for connecting pipelines at two sides and providing support for the whole device. The clamping structure and the sealing structure are located inside the support structure. The clamping structure is driven by the execution mechanism, and under the drive of the execution mechanism, the clamping structure presses on the blind plate () to eliminate a gap between two sides of the blind plate, so that a seal is formed by means of the sealing structure. When a gap is formed away from the blind plate (), the open/blind state of the blind plate () is switched.

Fast blind plate switching device

A multi-beam apparatus for observing a sample with oblique illumination is proposed. In the apparatus, a new source-conversion unit changes a single electron source into a slant virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample with oblique illumination, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means not only forms the slant virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots. The apparatus can provide dark-field images and/or bright-field images of the sample.

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Beijing, China

Shuai Li