Matsushita Electric Industrial Co., Ltd.

Shozo Watanabe

Tomohiro Okumura

Ichiro Nakayama

Tadashi Yano

Hideo Haraguchi

A high frequency coupler wherein a section of the high frequency coupler cut by a plane perpendicular to a straight line which connects the center of a joint surface between the coupler and an output portion of a matching circuit and the center of a joint surface between the coupler and the antenna has a configuration such that the section contains a plurality of line segments arranged radially from a point adjacent the center of the section. This arrangement enables the flow of currents having good symmetry, uniform distribution of currents flowing on antenna, and uniform plasma generation.

High frequency coupler, and plasma processing apparatus and method

Plasma is generated in a vacuum chamber (,) by supplying high frequency power to a spiral antenna (,) from an antenna-use high frequency power source (,) and by supplying high frequency power to an electrode (,) by an electrode-use high frequency power source (,) in a state where evacuating a vacuum chamber (,) while introducing a specified gas into the vacuum chamber, thereby controlling the vacuum chamber at a predetermined pressure. Plasma processing such as etching is performed on a substrate (,) located on the electrode (,), the interior of the vacuum chamber is heated to 80&deg; C. or higher, wherein a resistance-heating heater (,) constituted of a heating element shielded from electromagnetic waves by a conductive sheath and a pressure-weld type thermocouple (,) provided on a dielectric body (,) are connected to a temperature adjuster (,). A insulating material (,) is arranged between the heater (,) and the antenna (,), and an inner chamber (,) including a belt heater (,) is also arranged.

Method and device for plasma treatment

A slidable avriable resistor to be used in television receiver and in stereophonic set comprises a lower case member of an insulating material having a resistor member and a conductor on it disposed in lengthwise direction, a upper metallic cover having a long opening in lengthwise direction at the top of the cover, a slidable member of an insulating material with an arm projecting through the opening from the top of the slidable member having a brush extending from the lower side of the slidable member and sliding on the resistor and the conductor for electric conduction, and a flat rectangular plate of insulating material slidably disposed through a passage in the slidable body. By this construction should any metallic piece enter through the opening, the metallic piece is prevented from making contact with the resistor member or the conductor. Thus unexpected electric shock or damage can be prevented.

Growing community of inventors

Katano, Japan

Shozo Watanabe