Ebara Corporation

Other

Kabushiki Kaisha Toshiba

Shozo Oguri

Kenichi Shigeta

Koji Ono

Kenichi Sasabe

Masato Kurita

Yasuhisa Kojima

Tadanori Egawa

Hideo Aizawa

Yoshikuni Tateyama

A polishing apparatus comprises a polishing tool, a substrate holding member, and a sensor for detecting a failure of a substrate to be polished.

Polishing apparatus

A polishing apparatus for polishing a workpiece comprises a polishing table having a polishing surface and a top ring for holding the workpiece and pressing the workpiece against the polishing surface. The polishing table and the top ring are rotated independently of each other. The polishing apparatus further comprises a dresser for dressing the polishing surface with certain timing and a sensor for observing a property of the polishing surface on the polishing table when the polishing surface is being dressed by the dresser.

Disclosed is a polishing apparatus that comprises a polishing tool, a substrate holding member, a measuring device to measure a drive current of a drive unit while the drive unit drives at least one of the polishing tool and the substrate holding member, and a failure detection unit to detect either jumping of the substrate from the substrate member or breakage of the substrate. While a substrate is held by a substrate holding member and pressed against the polishing tool during a polishing operation, the failure detection unit will detect jumping of the substrate from the substrate holding member or breakage of the substrate based on a comparison of the value of the drive current with a threshold value, or a comparison of a waveform pattern of the drive current with a predetermined waveform pattern.

A polishing apparatus has a turntable having a polishing surface thereon, and a top ring for holding a workpiece and pressing the workpiece against the polishing surface of the turntable. The workpiece can be polished by the polishing surface of the turntable while the turntable and the top ring are being rotated. A workpiece dislodgment detector is provided to detect the workpiece which is dislodged from the top ring. The workpiece dislodgment detector has a sensor provided adjacent to the top ring, and the sensor is preferably positioned alongside of the top ring and downstream of the top ring with respect to a direction in which the turntable is rotated.

Growing community of inventors

Kanagawa-ken, Japan

Shozo Oguri