Tokyo Shibaura Denki Kabushiki Kaisha

Shibaura Mechatronics Corporation

Shozo Kawasaki

Yoshinori Hayashi

Hideki Mori

Katsutoshi Nishida

Masae Nakanishi

Toshihiko Ochiai

Akio Ando

Koichi Miyazono

Yoko Ono

Hiroshi Wakaba

A substrate surface inspection apparatus and method enabling judgment and analysis of the state of even portions of a substrate supported by supports using a captured image are provided. A support mechanismis used where positions of arrangement of substrate support positions along the direction perpendicular to a scan direction by a plurality of first supportstoare set outside the image capturing ranges of the substrateby the imaging unitsat the first relative position and inside the common image capturing range and where positions of arrangement of substrate support positions along the direction perpendicular to the scan direction by the plurality of second supportstoare set outside the image capturing ranges of the substrate by the imaging units at the second relative position and inside the common image capturing range. The surface of the substratesupported by the plurality of first supports is scanned and captured by the imaging units at the first relative position, the imaging units are moved to the second relative position, then the surface of the substratesupported by the plurality of second supports is scanned and captured by the imaging units at the second relative position.

Substrate surface inspecting apparatus and substrate surface inspecting method

A method of manufacturing a radial flow turbine rotor is disclosed, which comprises the steps of injection molding a rotor body including a conical shaft and a plurality of blades formed on the periphery of the shaft and at an angle to the axis of the shaft from a ceramic material using a mold having parting lines corresponding to blade edges such that projections are formed on the blade edges, sintering the molding thus obtained, and grinding the edge surfaces of the blades facing a casing. The blades are thus provided with projections on their inlet and outlet edges which face a fluid passage.

Method of manufacturing radial flow turbine rotor

Growing community of inventors

Yokohama, Japan

Shozo Kawasaki