Ulvac, Inc.

Shouta Kanai

Takahiro Yajima

Yuko Kato

Tadashi Oka

Yousuke Matsumoto

Yasuaki Murata

To provide a device structure that is capable of preventing oxygen, water, and the like from entering the device, and a method of producing the same. A device structureaccording to an embodiment of the present invention includes a substrate (base), a device layer, a first inorganic material layer (convex portion), and a first resin material. The substratehas a first surfaceand a second surfaceopposite to the first surface. The device layeris arranged on at least the first surfaceout of the first and second surfacesand. The first inorganic material layeris formed on the first surface. The first resin materialis unevenly arranged around the first inorganic material layer

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Kanagawa, Japan

Shouta Kanai