Industrial Technology Research Institute

Atma Champ Ent. Corp.

Shou-Cheng Shen

Chao-Feng Sung

Yu-Lin Hsu

Hsin-Yun Hsu

Kuo-Hsin Huang

Kai Hsiang Chang

I-Chung Kao

Kuo-Jung Sun

A roller assembly for transporting a substrate includes a step roller, a first transport roller, and a second transport roller. The step roller includes a main roller, an air cylinder, and a pair of edge rollers. The air cylinder is sleeved on the main roller, and includes a plurality of air jetting holes and a plurality of air suction holes. The edge rollers are disposed on the main roller and are located on opposite ends of the air cylinder. The first transport roller and the second transport roller are disposed on opposite sides of the step roller, wherein the substrate is transported from the first transport roller to the second transport roller through the step roller. A method using the same is also provided.

Roller assembly, step roller thereof, and method for transporting substrate using the same

Growing community of inventors

Taipei, Taiwan

Shou-Cheng Shen