Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,295 patents)
2 patents:
1. 12174549 - Liquid amount measuring method and computer-readable recording medium
2. 11726409 - Substrate processing system, liquid amount measuring method, computer-readable recording medium, and measuring jig