Toyota Jidosha Kabushiki Kaisha

Shota Matsuda

Hiromichi Nakata

Takayasu Sato

Yoji Sato

Kazutaka Tachibana

Daiki Tsuboi

A film forming apparatus includes a cylindrical evaporation source, an electrode, and a gas passage. The evaporation source is composed of metal and includes an internal space for accommodating a workplace. The electrode is arranged in the internal space of the evaporation source, The gas passage supplies gas to the internal space of the evaporation source from a space outside the evaporation source. The gas passage includes an end portion located in the internal space. The end portion of the gas passage includes a first section composed of a first material and a second section composed of a second material. The first material and the second material have different thermal expansion coefficients.

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Toyota, Japan

Shota Matsuda