Screen Holdings Co., Ltd.

Shota Majima

Provided is a drawing apparatus capable of drawing with high accuracy on a surface having a shape whose height exceeds a focal depth without complicatedly adjusting focus of an optical system. A substrate can be placed on a stage. A drawing head includes a spatial light modulator that generates modulated light, and a projection optical system that focuses the modulated light on a focus position in a height direction over the stage. A mover relatively moves the stage and the drawing head in the horizontal direction. A controller controls the mover and the drawing head. The controller controls the spatial light modulator based on correction pattern data representing a correction pattern, and the correction pattern data is generated by correcting design pattern data representing a design pattern based on surface profile data representing a surface profile of the substrate.

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Kyoto, Japan

Shota Majima