Toyobo Co., Ltd.

Shota Hara

Tetsuo Okuyama

Masahiro Yamashita

Naoki Watanabe

Toshiyuki Tsuchiya

Kaya Tokuda

The invention provides a laminate including a polyimide film and an inorganic substrate, which has a number density of blisters including carbide particles therein of/mor less, an average height of blisters of 2 μm or less, a product of the number density of the blisters (blisters/m) and the average height of the blisters (μm) of 20 or less. The inventive laminate can be obtained by laminating the polyimide film and the inorganic substrate after sufficiently purifying and cleaning to remove foreign bodies made of inorganic substance therefrom, followed by heat treating the laminate at a temperature of 350-600° C. and then rapidly cooling it to carbonize and reduce the organic foreign bodies, and also to rapidly cool the gas contained in the blisters, which leads to reduced height of blisters.

Laminate of polyimide film and inorganic substrate

A laminate mainly made of polyimide with low thermal expansion, high mechanical strength, and high heat resistance, and a method for manufacturing the same are provided. A surface of a polyimide film is activated and then treated by a silane coupling agent. Subsequently, the obtained silane coupling agent-treated polyimide films are superimposed, and pressure and heat are applied to the superimposed polyimide films so as to manufacture a polyimide film laminate. The obtained polyimide film laminate has a cross-sectional structure of superimposing polyimide film layers and silane coupling agent condensate layer(s) alternately to each other. Adhesive strength between the polyimide films of the polyimide film laminate of the present invention does not change largely from initial adhesive strength even after heat treatment at 400&#xb0; C. for 15 minutes. Further, the polyimide film laminate exhibits a high bending elastic modulus and impact resistance.

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Otsu, Japan

Shota Hara