Denki Kagaku Kogyo Kabushiki Kaisha

Shojiro Watanabe

Takashi Kawasaki

Kenji Nomura

Masaharu Suzuki

Hiroaki Tanji

A pyrolytic boron nitride article of the invention has uniform structure and has 0.5 or less nodules/cm.sup.2 in average all through the overall surface of the article and 2 or less nodules in any portion of the unit square centimeter on the surface of the article. The pyrolytic boron nitride article is produced by depositing boron nitride through a vapor phase, using a boron halide gas and an ammonia gas as the starting materials. Upon production, the ammonia gas or a gas mixture containing the ammonia gas is not contacted directly with graphite at 300.degree. to 1850.degree. C.

Method for producing pyrolytic boron nitride article

A pyrolytic boron nitride article has a uniform structure 0.5 or less nodules/cm.sup.2 in average all through the overall surface of the article and 2 or less nodules in any portion of a unit square centimeter on the surface of the article. The pyrolytic boron nitride article is produced by depositing boron nitride through a vapor phase, using a boron halide gas and an ammonia gas as the starting materials. In production, the ammonia gas or a gas mixture containing the ammonia gas is not contacted directly with graphite at 300.degree. to 1850.degree. C.

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Machida, Japan

Shojiro Watanabe