Yamatake Corporation

Azbil Corporation

Shoji Kamiunten

Shinichi Ike

Nobuhiko Zushi

Seishi Nakano

Hideyuki Tanaka

Yoshiyuki Ishikura

Seiichiro Kinugasa

Koji Seki

Masanori Anzai

Junji Kumasa

Tarou Nakata

A magnetic spring device includes a permanent magnet, a first yoke and a second yoke, disposed to oppose each other with the permanent magnet interposed therebetween, a movable element, made from a magnetizable body, provided to enable linear movement in an axial direction thereof, in a state wherein a location of an axis is constrained, between the first and second yokes, away from the permanent magnet, where a magnetic path of a magnetic flux that exits from an N-pole of the permanent magnet and returns to a S-pole is formed together with the first and second yokes, and a magnetic flux distribution controlling portion that changes a distribution of an amount of magnetic flux that is provided from the permanent magnet through the first and second yokes to the movable element, and an amount of magnetic flux from the permanent magnet that is not provided to the movable element.

Magnetic spring device

A flow sensor may be formed of a sensor chip in which a flow rate detecting section is formed on an electric insulating film applied to cover at least a part of a concave portion formed on an upper surface of a substrate and may also include a flow path forming member which is provided on the sensor chip and has a flow path of a fluid flowing through the flow rate detecting section formed therein.

Flow sensor unit including an insulating member interposed between the sensor chip and the attachment plate

A flow sensor may include a heater for heating a partial region of the outer wall surface of a pipe forming a flow path or for heating a particular region in the pipe; and a temperature detector for measuring the temperatures of regions, the regions being on the upstream side and the downstream side of the pipe with respect to the heated region. The temperature detector may include an upstream-side non-contact temperature detector and a downstream-side non-contact temperature detector arranged near the outer wall surface of the pipe in a state of being not in contact with the outer wall surface, and the non-contact temperature detectors can measure the temperatures of the upstream-side heat energy radiating region and downstream-side heat energy radiating region in a state of being not in contact with the outer wall surface of the pipe.

Flow sensor with non-contact temperature detecting means

A simply structured flowmeter in which an influence of a dilatational wave on a thermal flow rate sensor is suppressed, and measurement accuracy is enhanced. The flowmeter has not only the thermal flow rate sensor that is placed to face a flow channel and detects a flow rate of fluid flowing through the flow channel but also a micro path (for example, narrow pipe) that is provided to the flow channel and blocks a dilatational wave created in the flow channel from being transmitted to the thermal flow rate sensor.

Flowmeter and flow control device

A flow sensor () is constituted by a substrate () having a front surface () side facing a channel () for a measurement target fluid (), and a channel forming member () and a plate () disposed oppositely across the substrate (). The substrate () is formed of stainless steel having a thickness of about 50 &#x3bc;m to 150 &#x3bc;m into a plate. An electric insulating film is formed on that surface () of the substrate () which is opposite to the channel () side, and a temperature detection sensor () for measuring the flow velocity (flow rate) of the fluid (), an ambient temperature sensor (), an electrode pad (), and a thin metal film () for wiring are formed on it.

Flow sensor

A flow sensor includes a substrate, an electrical insulating film, and a flow velocity detection mechanism. In the substrate, a diaphragm portion having a first surface in contact with a measurement target fluid and a thick fixing portion surrounding the diaphragm portion are integrally formed. The electrical insulating film is formed on a second surface of the diaphragm portion which is on a side opposite to the first surface. The flow velocity detection mechanism is arranged on the electrical insulating film. A method of manufacturing a flow sensor is also disclosed.

Flow sensor and method of manufacturing the same

A flow velocity detector, wherein an upstream side temperature sensor ( U ) and a downstream side temperature sensor ( D ) are disposed on both sides of a heater ( - ) with the recessed and projected direction of the heater ( - ) in comb tooth-shape positioned approximately in parallel with the flow direction A of a detected fluid, whereby heat from the heater ( - ) first heats the crank-shaped connection parts (J) of the temperature sensors ( U D ) in comb tooth shape, respectively, and then transfers through straight line parts (S) along the crank-shapes in the direction approximately in parallel with the flow direction of the detected fluid.

Growing community of inventors

Tokyo, Japan

Shoji Kamiunten