Mitsui Minings & Melting Co., Ltd.

Shoji Imaura

Hitoshi Kajino

Yasuhiro Seto

Masahiro Koide

Out of sintered metal carbides having an extremely high melting point, there is provided a sintered metal carbide which can be produced without having to perform sintering under high pressure such as hot pressing or HIP, having a high relative density and excellent mechanical strength. A sintered metal carbide of at least one metal selected from the group consisting of elements of Groups 4 and 5 of the periodic table, wherein the sintered metal carbide contains Si element of 0.1 wtppm or more and 10,000 wtppm or less.

Sintered metal carbide and heat-resistant member for silicon carbide semiconductor manufacturing device comprising same

A sintered rare earth oxyfluoride compact is composed of LnOF(wherein Ln is a rare earth element; and a, b, and c each independently represent a positive number, provided that they are not equal to each other) or Ca-stabilized LnOF as a primary phase and LnOF unstabilized with Ca as a secondary phase. The intensity ratio of the XRD peak of the (018) or (110) plane of the unstabilized LnOF to the highest XRD peak of LnOFis preferably 0.5% to 30%.

Rare earth oxyfluoride sintered body and method for producing same

An yttrium oxyfluoride is represented by YOF and is stabilized by a fluoride represented by CaF. Preferably, the number of moles of Ca with respect to 100 mol of yttrium is from 8 to 40 mol. A powder material is made of a first powder mixture including a calcium fluoride powder represented by CaFand an yttrium oxyfluoride powder represented by YOF, or a second powder mixture including a calcium fluoride powder represented by CaF, an yttrium fluoride powder represented by YF, and an yttrium oxide powder represented by YO. A production method involves firing a molded product of the first or second powder mixture under predetermined conditions.

Yttrium oxyfluoride, starting material powder for production of stabilized yttrium oxyfluoride, and method for producing stabilized yttrium oxyfluoride

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Omuta, Japan

Shoji Imaura