Kabushiki Kaisha Toshiba

Tohoku University

Kokusai Electric Co., Ltd.

Shoichi Ono

Kuniyoshi Yokoo

Tadashi Okamoto

Nobuo Mikoshiba

Fumihide Ikeda

Junichi Murota

Masao Sakuraba

Harushige Kurokawa

A vapor deposition apparatus and method in which pulse waveform light is applied to a sample sealed in a reaction chamber. The sample is exposed to gaseous material while the pulse waveform light is applied creating one or plural atomic layers. Alternate layers of plural substances or alternate multiple layers of plural substances can be formed by alternating the introduction of gaseous materials with the application of pulse waveform light.

Vapor depositing method

In a peniotron, a hollow electron beam is generated from a cathode gun assembly and a DC magnetic field is applied to the electron beam from solenoid coils. Thus, each electron of the electron beam is gyrated into a resonant cavity and into propagating waveguide sections which are maintained in auto-resonant conditions so that the electrons interact with an electromagnetic waves of TE mode not only in the resonant cavity section but also in a waveguide section. Accordingly, the electromagnetic wave is oscillated in the resonant waveguide section and amplified in the propagating waveguide section in such a manner that the level of the electromagnetic wave in the resonant cavity section is far less than the output power from said propagating waveguide.

Auto-resonant peniotron having amplifying waveguide section

An ion pump for producing an ultrahigh degree of vacuum comprising a space formed between a first perforated flat plate-shaped electrode and a second flat plate-shaped electrode and having a high frequency electric source connected between the first and second electrodes, said space being operative to induce multipactor effect between said first and second electrodes, and an ionization space adjacent to one of said first and second electrodes and formed between a first perforated getter electrode and a second getter electrode applied with a negative potential, said ionization space being operative to cause the moving electrons produced by the multipactor effect to collide with gas molecules and ionize the latter.

Ion pump for producing an ultrahigh degree of vacuum

Growing community of inventors

Sendai, Japan

Shoichi Ono