Horiba Stec, Co., Ltd.

Shohei Yamano

Hiroshi Takakura

Hiroyuki Ebi

A flow rate sensor is disclosed, comprising a flow rate calculation part that calculates a flow rate of a fluid based on an expression using X/Xthat satisfies an expression at least in a certain range of the flow rate when an output of a constant temperature control circuit corresponding to an upstream resistor is defined as V, an output of a constant temperature control circuit corresponding to a downstream resistor is defined as V, and the flow rate is defined as and the flow rate calculation part corrects the zero point output as being an output when the flow rate is zero by using a zero offset function (OFS) defined as a function of V+VX/X.

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Kyoto, Japan

Shohei Yamano