Hitachi-high-technologies Corporation

Hitachi, Ltd.

Samsung Electronics Co., Ltd.

Hitachi High-technologies Co.

Shohei Terada

Kazutoshi Kaji

Yoshifumi Taniguchi

Tatsumi Hirano

Shigeto Isakozawa

Jong-bong Park

Gyeong-su Park

Yoshihumi Taniguchi

Se-ahn Song

Hiroshi Yoshida

Tadashi Otaka

Matahiro Komuro

Koichi Watanabe

Takashi Anazawa

Yasuhira Nagakubo

Yasuhiko Tada

Rena Akahori

Takanobu Haga

Hiromitsu Seino

Yusuke Asari

Yasuichiro Watanabe

The present invention aims at providing an iron-nitrogen-based soft magnetic steel sheet having a saturation magnetic flux density higher than that of pure iron, a method for manufacturing the soft magnetic steel sheet, and a core and a dynamo-electric machine in which the soft magnetic steel sheet is used. The soft magnetic steel sheet according to the present invention includes C, N, and the balance of Fe and inevitable impurities and is comprised of an α phase, an α' phase, an α″ phase, and a γ phase. The α phase serves as a main phase, a volume ratio of the α″ phase is 10% or more, and a volume ratio of the γ phase is 5% or less. The core according to the present invention includes a laminated body of the soft magnetic steel sheets.

Soft magnetic steel sheet, method for manufacturing the soft magnetic steel sheet, and core and dynamo-electric machine in which the soft magnetic steel sheet is used

The purpose of the present invention is to provide a DNA transport control device having excellent reliability and durability, and a DNA sequencing device that uses the DNA transport control device. The present invention provides a DNA transport control device having a nanopore which allows for the passage of only the DNA strand of a single molecule, and a DNA sequencing device that uses the DNA transport control device. The DNA transport control device is characterized by the following: including a base material having openings and a thin film a block copolymer formed on the base material; the thin film including microdomains that are formed as a result of self-assembly of the block copolymer and that penetrate the thin film, and a matrix surrounding the microdomains; and the nanopore being formed from one opening in the base material and a single microdomain.

DNA transport control device and method for producing same, as well as DNA sequencing device

A sample holder for an electron microscope has multiple sample stands, can allow at least one sample stand to move, and enables multiple samples for a transmission electron microscope to be prepared by a focused ion beam apparatus. A holder tip opening is provided in a tip of the sample holder. A back end of the sample holder has a knob, a rolling mechanism, a coarse adjustment mechanism, and a connector. By pressing the knob, fixation of the rolling mechanism is canceled, and the back end from the rolling mechanism and the tip of the sample holder will rotate. This rolling mechanism enables arrangement of the samples to be rotated in both the observing of a sample and the preparing of a sample for a transmission electron microscope with the focused ion beam apparatus. Moreover, the sample stand is movable by the coarse adjustment mechanism and the fine adjustment mechanism.

Sample holder for electron microscope

The present invention realizes a specimen holder for a charged-particle beam apparatus capable for moving at least one specimen support, and for obtaining the image of the transmission electron microscopy, or the like of all specimens arranged in the specimen holder with high spatial resolution. The retainer plates are put on the specimen supports after the specimen supports are set on the specimen stages at the end portion of the specimen holder respectively. Thereafter, the specimen supports and the retainer plates are fixed to the specimen stages. The vibration damping mechanism is arranged on the end portion side of the specimen holder. The vibration of the specimen support can be prevented or restricted by the condition that the vibration damping mechanism contacts to the specimen support. Accordingly, the transmission electron microscopy image can be obtained with high spatial resolution power.

Specimen holder for charged-particle beam apparatus

A transmission electron microscope apparatus, a sample holder and a sample stage and a method for acquiring spectral images as well are provided which can acquire spectral images at a time from a plurality of samples and measure highly accurate chemical shifts from electron energy loss spectra extracted from the spectral images. A transmission electron microscope apparatus comprises an electron gun for emitting an electron beam, a condenser lens for converging the emitted electron beam, a plurality of sample stages radiated with a converged electron beam and adapted to mount samples, a sample movement control unit for moving the sample stages, image-forming lenses for forming an image of an electron beam having transmitted through the plural samples, an electron spectrometer adapted to perform spectrometry of the electron beam in accordance with energy amounts the image-formed electron beam has and deliver spectral images obtained at convergence positions which are different in energy dispersion axis direction and in a direction orthogonal to the energy dispersion axis direction to thereby acquire spectral images from the plural samples at a time, and an image display unit for displaying acquired spectral images.

Transmission electron microscope apparatus comprising electron spectroscope, sample holder, sample stage, and method for acquiring spectral image

In a spectral image formed by two orthogonal axes, one of which is an axis of the amount of energy loss and the other of which is an axis of positional information, by the use of an electron spectrometer and a transmission electron microscope, distortion in the spectral image of a sample to be analyzed is corrected with high efficiency and high accuracy by comparing electron beam positions calculated from a two-dimensional electron beam position image formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information) with reference electron beam positions, and calculating amounts of the distortion based on the differences of the electron beam positions. Method and apparatus are offered which correct distortion in a spectral image with high efficiency and high accuracy, the image being formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information).

Transmission electron microscope having electron spectrometer

A sample transfer device is provided which can insert to a charged particle beam apparatus a sample to be observed and analyzed under irradiation of a charged particle beam while suppressing to a minimum the time to expose the sample to the atmospheric environment. The sample transfer device for transferring the sample to be observed and analyzed by irradiating the charged particle beam comprises an expansible hollow member capable of accommodating a sample holder mounting the sample, a fixing member for fixing the sample holder within the expansible hollow member, and a sealing member communicating with the interior of the expansible hollow member to open/close an opening through which the sample holder passes.

Sample transfer device and sample transferring method

A lens adjustment method and a lens adjustment system which adjust a plurality of multi-pole lenses of an electron spectrometer attached to a transmission electron microscope, optimum conditions of the multi-pole lenses are determined through simulation based on a parameter design method using exciting currents of the multi-pole lenses as parameters.

Electron microscope with electron spectrometer

A sample holder capable of holding samples is provided which comprises

A transmission electron microscope is capable of correcting, with high efficiency and high accuracy, an electron energy loss spectrum extracted from each of measured portions included in an electron energy loss spectral image with two axes representing the amount of an energy loss and positional information on a measured portion. The transmission electron microscope has an electron spectroscope and a spectrum correction system. The spectrum correction system corrects a spectrum extracted from each measured portion included in an electron energy loss spectral image acquired from a sample based on a difference between a spectrum extracted from a standard portion of a standard spectral image and a spectrum extracted from a portion different from the standard portion.

Transmission electron microscope having electron spectroscope

An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.

Method and apparatus for observing inside structures, and specimen holder

In order to correct measurement magnification and measurement position of a spectral image with high efficiency and with high accuracy using an electronic spectroscope and a transmission electron microscope regarding the spectral image formed in two orthogonal axes which are an amount of energy loss axis and a measurement position information axis; a method for correcting magnification and position and a system for correcting magnification and position, both of which are capable of correcting measurement magnification and measurement position of a spectral image with high efficiency and with high accuracy using an electronic spectroscope and a transmission electron microscope regarding the spectral image formed in two orthogonal axes which are an amount of energy loss axis and a measurement position information axis, are provided.

Transmission electron microscope provided with electronic spectroscope

A method for evaluating thin films comprises the steps of inputting measurement conditions, generating electron beams from an electron source to condense the electron beams to a specimen by a condenser lens, enlarging the electron beams transmitted by the specimen with imaging lenses to image an enlarged image of the specimen, acquiring elemental maps of the specimen with an element analyzer to display the acquired elemental maps, measuring a length of the elemental maps, and correcting the measurement conditions. Disclosed is an evaluating apparatus that implements the above evaluating method.

Growing community of inventors

Hitachinaka, Japan

Shohei Terada