Kabushiki Kaisha Akashi Seisakusho

Shogo Shirai

Akira Onoguchi

Haruo Uchida

A multiple electron lens having two axially spaced polepieces defining a space therebetween. The polepieces each have a plurality of axial through openings aligned coaxially defining electron beam paths. A sole anode plate is disposed axially spaced from the polepieces and has openings aligned with the openings defining the beam paths and equal in number thereto. Each beam path has an auxiliary exciting coil and a corresponding stigmator coaxially arranged with the related beam path within the space defined between the polepieces.

Multiple electron lens

An apparatus for releasably and adjustably mounting a specimen in an electron microscope. A specimen-holding unit is releasably and fluidtightly mounted in an evacuatable chamber and abutting the lens of the electron microscope in the mounted position. The unit is held in place by the pressure differential between the chamber and the atmosphere when the chamber is evacuated. The specimen-holding unit comprises a rotatable specimen-holding shaft disposed eccentrically within a rotatable support member. The specimen is variably positioned under the electron beam by the rotation of the member and the rotation of the shaft with respect to the member.

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Yokohama, Japan

Shogo Shirai