Kawasaki Jukogyo Kabushiki Kaisha

Shogo Matsuoka

Takayuki Fukushima

Shinya Kinoshita

Tetsuya Yoshida

Hiroyuki Okada

A robot hand includes base body defining gripping position of substrate, first contacting part provided to base body at tip-end side and configured to contact first part of edge part of substrate when substrate is gripped, rotary body provided on base-end side of base body and having second contacting part configured to contact second part of edge part of substrate when substrate is gripped, and mobile body having shaft part to be inserted into shaft hole of rotary body, and configured to move toward tip end of base body to move rotary body toward tip end of the base body. An axial-center line of shaft part extends in thickness directions of base and rotary bodies provided so as to have clearance in axial direction of shaft part with respect to shaft part.

Robot hand and robot having the same

A substrate transfer device includes a manipulator, a substrate gripping hand, an actuator configured to rotate the substrate gripping hand about a roll axis, and a controller adapted to operate the manipulator to hold a substrate by a first engaging member and a second engaging member of the substrate gripping hand, then operate the actuator so that a first principal surface of the substrate is located above a base member, and a normal line of the first principal surface is oriented downward from a horizontal plane, and move a movable guiding member toward the tip-end part of the base member so that the second engaging member, a third engaging member, and the movable guiding member grip the substrate.

Substrate transfer device and method of operating the same

A substrate conveying apparatus includes: a substrate grasping hand; a first holding member provided at a tip end portion of the substrate grasping hand and including a plurality of first jaw portions; a second holding member provided at a base end portion of the substrate grasping hand and including a plurality of second jaw portions; a first sensor provided at the base end portion of the substrate grasping hand and configured to emit light or ultrasound and detect substrates; and a controller configured to make the first sensor emit the light or the ultrasound toward spaces each between the adjacent substrates and determine whether or not the substrates are normally held.

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Kakogawa, Japan

Shogo Matsuoka