Ipex Inc.

Shogo Kurogi

Kenji Ogata

A substance detection element is described herein. The substance detection element includes a supporting substrate, a plate-shaped beam, a detection electrode, and a substance adsorption film. The plate-shaped beam is provided with a piezoelectric element. The detection electrodes detects information about the vibration frequency of the beam. The substance adsorption films changes the vibration frequency of the beam by adhesion of a substance. The substance adsorption films and the detection electrodes are respectively provided at the same position on the front and the back of the beam.

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Fukuoka, Japan

Shogo Kurogi