Bridgestone Corporation

Maruwa Co., Ltd.

Sho Kumagai

Masato Yoshikawa

Daisuke Kondo

Shingo Ohno

Fumio Odaka

Hidetoshi Ishihara

Toshikazu Shinogaya

Tadashi Onishi

Fumiya Kobayashi

Kazuhiro Ushita

Tomonori Ishigaki

Provided is a susceptor capable of achieving improved thermal uniformity while suppressing reduction in its temperature increase rate and heat utilization efficiency. A susceptor includes a plate-shaped first member including a wafer placement surface on which to place a wafer, and a second member supporting the first member and laid on the first member in the direction perpendicular to the wafer placement surface. The thermal conductivity of the first member is higher than the thermal conductivity of the second member.

Susceptor

A method for making a dry plating built-up film comprises providing silicon carbide as a starting source and subjecting to dry plating while changing a concentration of a reactive gas continuously or intermittently to deposit and form, on a substrate, a thin film having different refractive indices along its thickness. A method for making a sputter built-up film is also described, which comprising providing silicon carbide as a target and subjecting to sputtering while changing making electric power against the target continuously or intermittently to deposit and form a thin film having different refractive indices along its thickness.

Method for controlling a refractive index of a dry plating film and method for making a dry plating built-up film

Wafer and production thereof

There is provided a laminated structure having a silicon carbide coating layer formed by sputtering on an alloy substrate, and the silicon carbide has a light transmittance of 70% or greater. It is preferable that the alloy substrate is a magnetic alloy or a phase-changing alloy, the impurity ratio on the surface of the silicon carbide coating layer is 1.0&times;10 atoms/cm or less and the thickness of the silicon carbide coating layer is 10 to 100 nm. Since the laminated structure has a silicon carbide coating layer which is excellent in oxidation resistance, chlorine resistance, humidity resistance, and which has high refractive index, high light transmittance and the like, it is suitable for an optical disk recording medium such as a CD-RW, a DVD-RAM or the like.

Laminated structure, and manufacturing method thereof

A laminated structure which has a substrate formed of a synthetic resin or glass and a silicon carbide coating layer formed by sputtering, wherein the light transmittance of the silicon carbide coating layer is 80% or less. Preferably, the silicon carbide coating layer has a light reflectance of 10 to 50%, the synthetic resin is polycarbonate, the impurity ratio on the surface of the silicon carbide coating layer is 1.0&times;10 atoms/cm or less, and the silicon carbide layer has a thickness of 15 to 100 nm. The laminated structure is suitable for a recording medium such as a CD-ROM and a DVD-ROM since it has a silicon carbide layer excellent in oxidation resistance, chlorine resistance, moisture resistance, and the like.

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Kodaira, Japan

Sho Kumagai