Cvc Products, Inc.

Mykrolis Corporation

Shiyuan Cheng

Mehrdad M Moslehi

Cecil J Davis

Xiangqun Chen

Dorian Heimanson

Michael W Fortner

Dwight S Larson

Daryl Buchanan

Rapid thermal cycling of substrates in low-pressure processing environments is achieved by movable temperature conditioners located outside the processing environments. The substrates are mounted on thermally conductive pedestals for processing in the low-pressure environment. The temperature conditioners are movable both into and out of thermal contact with the pedestals outside the low-pressure environment to regulate transfers of heat through the pedestals between the substrates and the temperature conditioners. A translatable cooler block with a high thermal mass and a large interface area with the pedestal can be used as a temperature conditioner for more rapidly withdrawing heat from the substrate.

Rapid cycle chuck for low-pressure processing

A system and method for regulating the temperature of a sensor to reduce temperature gradients that form within the sensor. In one embodiment, the temperature gradients are reduced utilizing a temperature regulator with two controlled zones that surround a variable capacitance sensor. Measurements are made for the ambient temperature of at least one of the two temperature controlled zones, and the temperature differential between the two temperature controlled zones. The temperature regulator then adjusts the temperature of the two controlled zones based upon this differential in order to minimize the existing temperature gradient.

Temperature regulator for use with a pressure sensing device

An electromagnet having one or more coils wrapped around a plate-shaped core produces a uniaxial magnetic field in the vicinity of a substrate surface for orienting a magnetic film deposited onto the substrate surface. Variations in the magnetic mass of the plate-shaped core or in the magnetic permeability of the core mass are made to reduce angular skew and to improve uniformity of the uniaxial magnetic field. The variations generally involve a reduction in magnetic mass or permeability near a center of the core with respect to a periphery of the core. Cavities of various sizes and shapes but having symmetry with a magnetic axis can be formed in the core for this purpose.

Thin-film processing electromagnet with modified core for producing low-skew magnetic orientation

An electromagnet assembly magnetically orients a thin magnetic film deposited onto a surface of a substrate. The magnetic orientation can take place in a low-pressure processing environment such as during the deposition of the thin magnetic film or during a subsequent operation such as annealing. The electromagnet assembly includes a plate-shaped core located adjacent to the substrate and two or more electromagnetic coils that are wrapped in different directions around the core. Electrical currents conveyed through the electromagnetic coils are controlled for orienting a substantially uniaxial magnetic field throughout a range of angular positions in a plane of the substrate surface.

Method of magnetically orienting thin magnetic films with a

An electromagnet having one or more coils wrapped around a plate-shaped core produces a uniaxial magnetic filed in the vicinity of a substrate surface for orienting a magnetic film deposited onto the substrate surface. Variations in the magnetic mass of the plate-shaped core or in the magnetic permeability of the core mass are made to reduce angular skew and to improve uniformity of the uniaxial magnetic field. The variations generally involve a reduction in magnetic mass or permeability near a center of the core with respect to a periphery of the core. Cavities of various sizes and shapes but having symmetry with a magnetic axis can be formed in the core for this purpose.

Growing community of inventors

Richardson, TX, United States of America

Shiyuan Cheng