Applied Materials, Inc.

Shivaraj Manjunath Nara

Devendra Channappa Holeyannavar

Philip Allan Kraus

Keith R Berding

Upendra V Ummethala

Blake Erickson

Patrick John Tae

Sivasankar Nagarajan

Dhirendra Kumar

Anandakumar Parameshwarappa

Jeffrey C Hudgens

Paul Benjamin Reuter

Dean C Hruzek

Arunkumar Ramachandraiah

Embodiments disclosed herein include a diagnostic substrate, comprising a baseplate, and a first plurality of image sensors on the baseplate, where the first plurality of image sensors are oriented horizontal to the baseplate. In an embodiment, the diagnostic substrate further comprises a second plurality of image sensors on the baseplate, where the second plurality of image sensors are oriented at a non-orthogonal angle to the baseplate. In an embodiment, the diagnostic substrate further comprises a printed circuit board (PCB) on the baseplate, and a controller on the baseplate, where the controller is communicatively coupled to the first plurality of image sensors and the second plurality of image sensors by the PCB. In an embodiment, the diagnostic substrate further comprises a diffuser lid over the baseplate, the PCB, and the controller.

Smart camera substrate

A detector disc includes a disc body having a bottom disc and a top cover, the top cover including a first aperture. A sensor is disposed inside the disc body and positioned to be exposed to an external environment via the first aperture in the top cover. The solid state sensor is adapted to detect levels of chemical gas contaminants and output a detection signal based on detected levels of the chemical gas contaminants. A microcontroller is disposed on the PCB and adapted to generate measurement data from the detected levels of the chemical gas contaminants embodied within the detection signal. A wireless communication circuit is disposed on the PCB, the wireless communication circuit adapted to transmit the measurement data wirelessly to a wireless access point device.

Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room

Growing community of inventors

Bengaluru, India

Shivaraj Manjunath Nara