Kabushiki Kaisha Toshiba

Ebara Corporation

Shirou Mishima

Norio Kimura

Atsushi Shigeta

Katsuya Okumura

Masako Kodera

Seiji Ishikawa

Hiromi Yajima

Masayoshi Hirose

Riichirou Aoki

A polishing apparatus is a cluster type of apparatus having a plurality of units which perform various operations. The polishing apparatus includes a universal transfer robot having at least one arm for transferring a workpiece, a plurality of units disposed around the universal transfer robot and including a loading unit for receiving the workpiece to be polished, at least one polishing unit for polishing the workpiece, at least one washing unit for washing the workpiece which has been polished and an unloading unit for receiving the cleaned workpiece. Discrete mechanisms respectively transfer a clean workpiece and a dirty workpiece amongst the units.

Polishing apparatus

Growing community of inventors

Kanagawa-ken, Japan

Shirou Mishima