Rigaku Corporation

Shiro Umegaki

Hideaki Takahashi

Kiyoshi Ogata

Kazuhiko Omote

Yoshiyasu Ito

Hiroshi Motono

Sei Yoshihara

Shigematsu Asano

Katsutaka Horada

Akifusa Higuchi

Ryotaro Yamaguchi

Takao Kinefuchi

Naoki Matsushima

Licai Jiang

Boris Verman

Masahiro Nonoguchi

Asao Nakano

Go Fujinawa

Naoki Kawahara

Tomohiro Chaki

Makoto Kambe

Yuji Kusaka

Muneo Yoshida

Masataka Sakata

Masaru Okazaki

Atsushi Hamanaka

An X-ray inspection device of the present invention includes a sample placement unitfor placing a sample as an inspection target therein, a sample placement unit positioning mechanismfor moving the sample placement unit, a goniometerincluding first and second rotation membersthat rotate independently of each other, an X-ray irradiation unitinstalled on the first rotation member, and a two-dimensional X-ray detectorinstalled on the second rotation member. The sample placement unit positioning mechanismincludes a &#x3c7; rotation mechanismfor rotating the sample placement unitand a &#x3d5;-axis about a &#x3c7;-axis that is orthogonal to a &#x3b8;s-axis and a &#x3b8;d-axis at a measurement point P and extends horizontally.

X-ray inspection device

In an X-ray inspection device according to the present invention, an X-ray irradiation unitincludes a first X-ray optical elementfor focusing characteristic X-rays in a vertical direction, and a second X-ray optical elementfor focusing the characteristic X-rays in a horizontal direction. The first X-ray optical elementis constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.

X-ray inspecting device, X-ray thin film inspecting method, and method for measuring rocking curve

An X-ray thin film inspection device of the present invention includes an X-ray irradiation unitinstalled on a first rotation arm, an X-ray detectorinstalled on a second rotation arm, and a fluorescence X-ray detectorfor detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unitincludes an X-ray optical elementcomprising a confocal mirror for receiving X-rays radiated from an X-ray tube, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanismfor passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element

X-ray thin film inspection device

A coolant passage is formed inside the rotary shaft while an air passage is formed inside the casing. A mechanical seal is arranged between the coolant passage and the air passage. Leakage cooling water, which has leaked in the form of vapor from the mechanical seal, is relegated radially outwardly along with air by the action of a rotary vane, which is disposed in the air passage, and finally flows out of an air outlet. A coolant sensor may be provided to early detect the leakage water.

Rotating anode X-ray tube and X-ray generator

A soller slit is disclosed, which includes a plurality of metal foils and functions to restrict divergence of X-rays when arranged on an X-ray optical path. The metal foils are prepared by sintering a metal material such that surface thereof have high harmonic surface roughness. Alternatively, the metal foil has oxides formed by oxidation on the surfaces thereof such that the oxides can provide the high harmonic surface roughness. The high harmonic surface roughness of the metal foil restricts total reflection of X-rays at the metal foil. Therefore, it is possible to form high precision parallel X-ray beams by the soller slit to thereby improve resolution in an X-ray measurement.

Soller slit and manufacturing method of the same

Growing community of inventors

Tokyo, Japan

Shiro Umegaki