Anest Iwata Corporation

Shiro Tanigawa

Hiroshi Ito

Youhei Midorikawa

Yuki Takada

Takahiro Kagami

Takamitsu Nakayama

In a pump chamber (), a male rotor () having claw portions and a female rotor () having recesses into which the claw portions enter are secured to rotating shafts (and), respectively. The female rotor is provided with hollows on an upstream side in the rotational direction of the female rotor relative to a plane L containing the rotating shafts. For the hollows, the disposed position, size and configuration are selected so that a compression pocket P and a discharge opening remain in communication with each other through the hollow throughout the time from when the compression pocket stops communicating with the discharge opening and separates from the discharge opening until the compression pocket gradually reduces to disappear, and so that the hollow stops communicating with the discharge opening at the same time as the compression pocket disappears.

Claw pump with relief space

A scroll fluid machine includes a revolving scroll in which a revolving wrap stands upright on an end plate supported revolvably on a drive shaft, and a fixed scroll which is provided opposite the revolving scroll and in which a fixed wrap stands upright on an end plate. The revolving and fixed wraps overlap to form a compression chamber for compressing a fluid by causing the revolving scroll to revolve. The scroll fluid machine further includes a rod-shaped member attached to the end plate of the revolving scroll and extending to a rear surface side of the fixed scroll, which is a side not opposing the revolving scroll. A revolving plate is attached to the rod-shaped member, provided with a pin crank mechanism, and supported revolvably on the drive shaft. The revolving plate is provided with a sealing unit that seals the compression chamber in an axial direction.

Scroll fluid machine with axial sealing unit

A multistage vacuum pump has a pair of rotors disposed in each of pump chambers connected in stages. As the rotors rotate while intermeshing, a suctioned gas is compressed and discharged, angles of the rotors are adjusted so that a phase angle &#x394;&#x3b8; of the rotors of adjacent pump chambers relative to a rotation angle C of the rotors during a single cycle of the pump chambers from intake to discharge and the number of stages S of the rotors satisfies &#x394;&#x3b8;&#x2266;C/S. When a rotor angle is &#x3c6;1, an mth stage rotor angle is &#x3c6;m, and an nth stage rotor angle is &#x3c6;n in order from an upstream side of a gas flow direction, relationships of &#x3c6;1&#x3c;&#x3c6;m&#x2266;&#x3c6;n and &#x3c6;1&#x3c;&#x3c6;n, where n and m are natural numbers and n&#x3e;m, are satisfied.

Multistage vacuum pump

A multistage vacuum pump unit can save a power requirement and prevent the gas discharged outside of the unit from flowing-back inside the pump unit. A plurality of vacuum pumps are connected in series to form the multistage vacuum pump unit. A suction inlet of a first stage vacuum pump thereof is connected to a to-be-vacuumized container so that the space inside of the container becomes under a high vacuum condition. In an operating method, part of the gas discharged into a first intermediate passage from the first stage vacuum pump is branched during a low vacuum operation, and discharged toward an air atmosphere through a low conductance line provided with check valves that prevent the branched gas from flowing back.

Multistage vacuum pump unit and an operation method thereof

A drive transmission mechanism for transmitting torque between two or more rotary shafts in synchronization with one another without need for lubrication thereby eliminating occurrence of oil contamination, and an oil-free fluid machine equipped with the mechanism, are provided. A magnetic drive disk and a synchronization gear are attached to a rotary shaft connected to a drive motor, a magnetic drive disk and a synchronization gear is attached to a rotary shaft, torque transmission from the rotary shaft to the rotary shaft is carried out in two ways, via the magnetic drive disks and via the synchronization gears and at least one of the synchronization gears is made of plastic material. With the construction, torque transmit load between the rotary shafts via the synchronization gears is decreased, and a plastic gear or gears can be adopted for synchronization gears without reducing life of the gears without need for lubrication oil.

Growing community of inventors

Yokohama, Japan

Shiro Tanigawa