Otsuka Electronics Co., Ltd.

Shiro Kawaguchi

Kazuya Nakajima

Tsutomu Mizuguchi

Nobuyuki Inoue

Makoto Okawauchi

Goro Maeda

Toshiki Shinke

Hayato Takizawa

An optical measurement system includes a light source, a spectroscopic detector, a reference sample, a switching mechanism that switches between a first optical path through which a sample to be measured is irradiated with light from the light source and light produced at the sample is guided to the spectroscopic detector and a second optical path through which the reference sample is irradiated with light from the light source and light produced at the reference sample is guided to the spectroscopic detector, and a processing unit that calculates, by performing correction processing based on change between a first detection result at first time and a second detection result at second time, a measurement value of the sample from a third detection result provided from the spectroscopic detector as a result of irradiation of the sample with light from the light source at third time temporally proximate to the second time.

Optical measurement system, optical measurement method, and non-transitory storage medium having measurement program stored thereon

A film thickness measuring apparatus including: a measurement light path for irradiating a measurement target object with light from a light source; a correction light path for irradiating a reference member with light from the light source; and a light switching unit that selectively guides reflected light from the measurement target object or reflected light from the reference member, to a spectroscope.

Film thickness measuring apparatus and film thickness measuring method

An optical measurement apparatus includes: a probe including a transmissive optical member having a reference surface, the probe being configured to irradiate a sample with light through the reference surface, and receive a first reflected light from the reference surface, a second reflected light from a front side of the sample, and a third reflected light from a back side of the sample; and a calculator configured to calculate a first distance from the reference surface to the front side of the sample with use of a first reflection interference light to be generated by the first reflected light and the second reflected light, and to calculate a thickness of the sample with use of a second reflection interference light to be generated by the second reflected light and the third reflected light.

Optical measurement apparatus and optical measurement method

A measurement-purpose light source generates a measurement light used for measuring an optical characteristic of an object to be measured, and the measurement light includes a component in a wavelength range for measurement of the optical characteristic of the object. An observation-purpose light source generates an observation light used for focusing on the object to be measured and checking a position of measurement. The observation light is selected such that the observation light includes a component that can be reflected from the object to be measured. The measurement light and the observation light are thus applied independently to the object to be measured, through a common objective lens, and accordingly improvement of the precision in measurement of the optical characteristic and facilitation of focusing on the object to be measured are achieved simultaneously.

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Hirakata, Japan

Shiro Kawaguchi