University of South Florida

Shinzo Onishi

Scott Samson

Lawrence C Langebrake

Raj Popuri

Shekhar Bhansali

Melynda C Calves

Weidong Wang

Rahul Agarwal

Lawrence Lagebrake

The present invention provides a method of controlling a reactive sputtering system used in coating processes. More specifically, the present invention provides a microprocessor-based control system for reactive gases in a sputtering system, particularly during the start-up phase of operation. The preferred demand for such a reactive gas is predicted for every stage of the operation, and the reactive gas supply is amenable to predictive control provided by object program-driven mathematical formulae. The injection of reactive gas using time-advanced, sequential, mathematically-derived procedures simplifies overall system operation and provides a system with an optimal amount of reactive gas at an optimal time.

Reactive physical vapor deposition with sequential reactive gas injection

The present invention provides a DC high voltage converter having an oscillator driver, main switch array and topological enhanced capacitors. The switch array utilizes MEM cantilevers and topological capacitors for charge storages for the generation of a high voltage output from a low voltage input.

MEMS DC to DC switching converter

The present invention provides a DC high voltage converter having an oscillator driver, main switch array and topological enhanced capacitors. The switch array utilizes MEM cantilevers and topological capacitors for charge storages for the generation of a high voltage output from a low voltage input utilizing the chattering motion of the cantilever.

MEMS high speed switching converter

A hydrogen storage system using a coiled nano-foil hydride and methods for forming the hydrogen absorbing nano-foil coil without backing materials. Intercalation of hydrogen in metal hydrides allows for large amounts of hydrogen to be stored at atmospheric temperatures and pressures. Nano-films provide a large surface area for storage of hydrogen. Excessive heating of the system is avoided by use of a modified magnetron source, and the deposition rate is increased by employing stronger magnetic fields. The foil formed is capable of storage and of mechanical self-support without breakage and expansion up to 20% of its initial volume.

Hydrogen storage nano-foil and method of manufacture

In accordance with the present invention, a novel method to fabricate topological capacitors is provided. The fabrication method of the instant invention is based upon a reversed surface topology utilizing deep reactive ion etching to establish conductive capacitive elements and non-conductive capacitive element groups.

Method of manufacturing silicon topological capacitors

The present invention includes a novel method to fabricate corner cube retroreflectors, CCRs, where a majority of the wafer area acts as CCRs as compared to a maximum of 33% in previous MEMS CCRs. The present invention also allows for the fabrication of moveable cantilevers which operate at one-third the voltage as compared to a conventional planar cantilever.

Growing community of inventors

Seminole, FL, United States of America

Shinzo Onishi