Ngk Insulators, Inc.

Shinya Yoshida

Shuhei Fujita

Koji Kimura

Hiroyuki Tsuji

Takashi Ota

Kunihiko Yoshioka

Chikashi Ihara

Kazuhi Matsumoto

Toru Ogawa

Masato Shimada

Tatsuo Kawaguchi

Tatsuya Kuno

Yoshimasa Kondo

Seiya Inoue

Naoya Takase

Takeshi Tokunaga

Hironori Takahashi

Natsuki Hirata

Toshio Oda

Takayuki Ogata

Taro Usami

Kimihisa Kaneko

Yoshiyuki Kamei

Kenji Yonemoto

Yasuho Aoki

Yuito Abe

Tasuke Narishige

Aoi Saito

A member for a semiconductor manufacturing apparatus includes: a ceramic plate that has a wafer placement surface at an upper surface thereof; a plug disposition hole that extends through the ceramic plate in an up-down direction and that has a truncated conical space whose upper opening is larger than a lower opening thereof; a truncated conical plug that is disposed in the plug disposition hole, that allows gas to flow in the up-down direction, and whose upper surface is larger than a lower surface thereof; an adhesive layer that is provided between the plug disposition hole and the truncated conical plug; an electrically conductive baseplate that is joined to a lower surface of the ceramic plate through a joint layer; and a gas supply path that is provided in the baseplate and the joint layer and that supplies gas to the truncated conical plug.

Member for semiconductor manufacturing apparatus

An electric heating support includes a honeycomb structure having an outer peripheral wall and interior porous partition walls defining a plurality of cells forming a flow path. A pair of electrode layers are disposed on a surface of the outer peripheral wall so as to face each other across a central axis of the honeycomb structure. Protective layers cover the electrode layers, respectively, such that at least a part of each electrode layer is exposed. A pair of metal terminals are provided on the electrode layers. Each electrode layer is composed of a metal-ceramic mixed member. A portion of each electrode layer that is exposed from the protective layer is electrically connected to each of the pair of metal terminals.

Electric heating type support and exhaust gas purifying device

A method of assembling or disassembling a housing shelf configured at least from shelf plates and frames, including a step in which a chuck holds a frame; a step of determining, based on an image captured by an imager that captures an image of the frame held by the chuck and positioned at an imaged position, a position of a target portion of the frame on the image; and a step of determining, based on the determined position on the image, at least one correction value for causing a change in a release position for the frame when the frame is released from the chuck onto the shelf plate. The target portion may be an inner wall surface of the frame. An illumination unit may be arranged between the imager and the imaged position of the frame.

Method of assembling or disassembling housing shelf, method of producing ceramic fired body, and transferring system

A manufacturing method of a silicon carbide-based honeycomb structure, including a firing step of introducing extruded honeycomb formed bodies containing a silicon carbide-based component, together with firing members into a firing furnace, and firing the honeycomb formed bodies, to manufacture the silicon carbide-based honeycomb structure, wherein the firing members are formed by using a ceramic material containing 70 wt % or more of alumina, and the firing step further includes: an inert gas supplying step of supplying an inert gas to a furnace space of the firing furnace, and a gas adding step of adding a reducing gas to the furnace space.

Manufacturing method of silicon carbide-based honeycomb structure

A method for transferring a plurality of columnar honeycomb structures according to the present invention includes: subjecting first side surfaces of the plurality of columnar honeycomb structures to vacuum suction; and correctively transferring the plurality of the columnar honeycomb structures, optionally while supporting second side surfaces opposing to the first side surfaces of the plurality of columnar honeycomb structures by a supporting member.

Method and device for transferring columnar honeycomb structures

A drying apparatus includes a furnace body; a conveyor belt configured to move in an interior space of the furnace body, with an object to be dried loaded thereon; and a plurality of infrared heaters arranged above the conveyor belt in the interior space of the furnace body. A division wall is provided, which divides the interior space of the furnace body into a space Sincluding the conveyor belt and a space Sincluding the infrared heaters. In the division wall, first portions located at positions corresponding to the respective infrared heaters in the longitudinal direction are made of a material that transmits infrared radiation, whereas second portions located at positions corresponding to respective spaces between adjacent infrared heaters in the longitudinal direction are made of a material that does not transmit infrared radiation.

Drying apparatus

A heat conduction member includes: a cylindrical ceramic body, a metal pipe on the outer periphery side of the cylindrical ceramic body, and an intermediate member held between the cylindrical ceramic body and the metal pipe. The cylindrical ceramic body has passages passing through from one end face to the other end face and allowing the first fluid to flow therethrough. The intermediate member is made of material having at least a part having a Young's modulus of 150 Gpa or less. The first fluid is allowed to flow through the inside of the cylindrical ceramic body while the second fluid having lower temperature than that of the first fluid is allowed to flow on the outer peripheral face side of the metal pipe to perform heat exchange between the first fluid and the second fluid.

Heat conduction member

The manufacturing method of the honeycomb structure includes a forming step of a honeycomb formed body with non-fired electrodes where there is performed twice a non-fired electrode forming operation in which an electrode paste is attached to a plate including a printing screen, a side surface of a honeycomb formed body, the side surface being a curved side surface, is brought into a pressed state by a squeegee via the printing screen of the plate, in the state, the body is rotated and the plate is linearly moved along the side surface of the body, and the squeegee allows the electrode paste to permeate the printing screen and coat the side surface of the body; and a forming step of the honeycomb structure where the body with the non-fired electrodes is fired to obtain the honeycomb structure.

Manufacturing method of honeycomb structure

A nozzle is mounted on an end of an ejector for ejecting an aerosol on an ejection side in a honeycomb filter production apparatus. The nozzle is formed into a shape having a longitudinal direction. A single introduction port is formed at an end surface of the nozzle on one side in the longitudinal direction, and a plurality of discharge ports are formed at an end surface of the nozzle on the other side in the longitudinal direction. A single introduction passage extends linearly from the single introduction port in the longitudinal direction. A plurality of discharge passages are each branched from an end portion of the introduction passage on a side opposite to the introduction port and extend to corresponding one of the discharge ports in a direction tilted from the longitudinal direction.

Nozzle and honeycomb filter production apparatus using the same

The manufacturing method of the honeycomb structure includes a step of coating a surface of each of releasing sheets with a paste for an electrode, to prepare electrode forming sheets in which the releasing sheets are provided with electrode paste films; a formed honeycomb body with the electrode forming sheets forming step of attaching the electrode forming sheets to a side surface of a tubular formed ceramic honeycomb body which is the curved surface to prepare a formed honeycomb body with the electrode forming sheets; and a honeycomb structure forming step of firing the formed honeycomb body, or removing releasing sheets from the formed honeycomb body to form the formed honeycomb body with the pastes for the electrodes, and then firing the formed honeycomb body with the pastes for the electrodes, to obtain a honeycomb structure having a side surface provided with the electrodes.

A gripping jig for assembling whereby a force is applied to a molded body in a direction perpendicular to an assembling direction. When an assembling load is applied to the molded body, the force is adjustable with an adjustment screw such that the molded body is guided to move in the assembling direction. Since the force is applied from a direction different from the assembling direction, the molded body can move in the assembling direction, and since the force is adjustable, application of the assembling load to the molded body and the movement of the molded body can be adjusted. Since a plurality of the molded bodies are fixed and assembled respectively, when there are variations in size of the molded bodies, an excessive assembling load is is avoided with each molded body guided to move, so that a more uniform assembling load is applied to the plurality of molded bodies.

Gripping jig for assembling, assembling device, and producing method of assembled body

A manufacturing apparatus of a plugged honeycomb structure includes a table portion having a through hole into which the end of a honeycomb structure is inserted, positioning means for positioning and holding the honeycomb structure in the through hole of the table portion in such a manner that its end face appears on the side of a first face of the table portion, and a film holding portion fixing the remaining portion of a film on the side of a second face of the table portion. After or before fixing the film, holes corresponding to openings of cells of the honeycomb structure are formed in the film, and a plugging material is filled into the holes, to manufacture the plugged honeycomb structure using the apparatus.

Manufacturing apparatus of plugged honeycomb structure and manufacturing method of the same

A gripping jig for assembling applies a force to a molded body in a direction perpendicular to an assembling direction. When an assembling load is applied to the molded body, the force is adjustable with an adjustment screw such that the molded body is guided to move in the assembling direction. Since the force is applied from a direction different from the assembling direction, the molded body can move in the assembling direction, and as the force is adjustable, application of the assembling load to the molded body and movement of the molded body can be adjusted. Since a plurality of molded bodies are fixed and assembled respectively, when there are variations in size of the molded bodies, if an excessive assembling load is applied, each molded body is guided to move, so that more uniform assembling load is applied to the plurality of molded bodies.

Growing community of inventors

Nagoya, Japan

Shinya Yoshida