Dainippon Ink and Chemicals, Incorporated

Hitachi High-Tech Corporation

Shinya Ueno

Hidefumi Matsuya

Shahedul Hoque

Hiroshi Nishihama

Tomomasa Mitani

Toshio Mita

Yukiko Fujita

Susumu Koyama

Kumiko Fukakusa

Yoko Kawasaki

Mika Matsumura

Shaungqi Dong

Akira Komori

An object of the invention is to provide a charged particle beam apparatus capable of achieving both acquisition of an image having high resolution of an inspection target pattern and suppression of a beam irradiation amount when a specific pattern is an inspection target from a highly integrated pattern group. In order to achieve the object, a charged particle beam apparatus is proposed in which at least one of a stage and a deflector is controlled so as to move a field of view from a reference position to an inspection or measurement target pattern, the number of objects included in a first image obtained by scanning a position of the field of view in a moving process of the field of view with a charged particle beam of a first irradiation condition is counted, and in a case where the number of the objects satisfies a predetermined condition, a second image is generated based on scanning with a charged particle beam of a second irradiation condition of a higher dose than that of the first irradiation condition.

Charged particle beam apparatus

A practical polymerizable unsaturated polyester resin composition is provided, wherein a polyester skeleton derived from collected PET is introduced, for effective utilization of waste PET such as a PET bottle which has recently been considered a large obstacle to environmental protection. The polymerizable unsaturated polyester resin composition comprises a straight-chain polyester (A) having a (meth)acryloyl group at both ends of molecules and an ethylenically unsaturated monomer (B), said straight-chain polyester (A) having a (meth)acryloyl group at both ends of molecules being obtained by reacting: (a) a terephthalate oligomer having a hydroxyl group at both ends of molecules resulted from the alcoholysis reaction of collected waste polyethylene terephthalate by an aliphatic glycol having an ether bond, (b) a dibasic acid containing an aromatic dibasic acid as a principal component, and (c) a glycidyl meth)acrylate.

Polymerizable unsaturated polyester resin composition

The present invention provides a curable resin composition comprising: a polymer (A) containing a polymerizable unsaturated bonding group; and a polymerizable unsaturated monomer (B). Polymerizable unsaturated monomer (B) comprises as an essential component an oligoalkyl(C.sub.2 -C.sub.4)ether(n=2-15)-monoalkoxy(C.sub.1 -C.sub.18)-(meth)acrylate. This curable resin composition according to the present invention displays superior adherence, air-drying, water resistance, and storage stability properties in addition to a reduced odor.

Curable resin composition and coating material composition

Growing community of inventors

Tokyo, Japan

Shinya Ueno