Sanyo Electric Co., Ltd.

Shinya Tsuda

Yukinori Kuwano

Shoichi Nakano

Hiroyuki Kuriyama

Hisaki Tarui

Shigeru Noguchi

Hiroaki Izu

Akira Terakawa

Yukio Nakashima

Masato Nishikuni

Takao Matsuyama

Makoto Tanaka

Takeo Tsutsumi

An electrostatic motor for use as a power generating mechanism to be mounted on a micromachine includes a rotatable semiconductor substrate and a drive electrode disposed in proximity to the substrate. The semiconductor substrate is doped with a specified impurity element to form electromagnetic wave-static electric converters of p-n junction. When the motor is to be started, the converter in the vicinity of the electrode is irradiated with electromagnetic waves to set up an electric field between the opposed surfaces of the converter and the electrode to rotate the substrate by an electrostatic force due to the electric field.

Micromachine

A semiconductor device including a semiconducting layer made of polycrystalline silicon, an insulating film provided on an upper face of the semiconducting layer and an electrode provided on an upper face of the insulating film such that channels are formed on the upper face of the semiconducting layer, the improvement comprising: a further semiconducting layer made of amorphous silicon, which is provided between the semiconducting layer and the insulating film.

Semiconductor device

A field effect transistor comprises a source electrode, a drain electrode, a channel layer between the source electrode and the drain electrode, a gate electrode for controlling electric current in the channel layer, and a superlattice layer interposed between the channel layer and the gate electrode, the superlattice layer having a plurality of constituent thin layers perpendicular to a direction of electric current in the channel layer.

Field effect transistor

Growing community of inventors

Tsuzuki, Japan

Shinya Tsuda