Ngk Insulators, Inc.

Ngk Ceramic Device Ltd.

Shinya Takemura

Takashi Ebigase

Kenichi Tsuge

A piezoelectric/electrostrictive element having a piezoelectric body, a through-hole electrode, a first electrode, a second electrode, a third electrode. The piezoelectric body includes a through-hole in communication with a first main surface and a second main surface. The through-hole electrode is formed on an inner side surface of the through-hole. The first electrode is formed on the first main surface of the piezoelectric body, and connected to the through-hole electrode. The second electrode is formed on the second main surface of the piezoelectric body, and is connected to the through-hole electrode. The third electrode is formed on the second main surface of the piezoelectric body and isolated from the second electrode. A calculated average roughness in the inner side surface is larger than 0.11 microns and smaller than 16 microns. A maximum height roughness in the inner side surface is larger than 0.2 microns and smaller than 20 microns.

Piezoelectric/electrostrictive element and method for manufacturing the same

A piezoelectric/electrostrictive element has a piezoelectric body, a first electrode, a second electrode and a glass layer. The piezoelectric body is formed in a thin film-shape. The piezoelectric body has a first main surface and a second main surface. The first electrode is disposed on the first main surface of the piezoelectric body. The first electrode has an electrode side surface configured to be connected with the first main surface. The second electrode is disposed on the second main surface of the piezoelectric body. The glass layer is continuously formed on the first main surface and the electrode side surface. The glass layer containing glass as a principal constituent. The glass layer is isolated from the side surface of the piezoelectric body.

Growing community of inventors

Komaki, Japan

Shinya Takemura