Denso Corporation

Shinya Takei

Shuhei Mitani

Haruhito Ichikawa

Yukihiro Wakasugi

Ippei Takahashi

A semiconductor wafer includes a silicon carbide wafer and an epitaxial layer, which is disposed at a surface of the silicon carbide wafer and made of silicon carbide. The semiconductor wafer satisfies a condition that a waviness value is equal to or smaller than 1 micrometer. The waviness value is a sum of an absolute value of a value &#x3b1; and an absolute value of a value &#x3b2;. A highest height among respective heights of a plurality of points with reference to a surface reference plane within a light exposure area is denoted as the value &#x3b1;. A lowest height among the respective heights of the points at the epitaxial layer with reference to the surface reference plane within the light exposure area is denoted as the value &#x3b2;.

Growing community of inventors

Kariya, Japan

Shinya Takei