Kawasaki Jukogyo Kabushiki Kaisha

Kawasaki Robotics (usa), Inc.

Shinya Kitano

Ming Zeng

Masaya Yoshida

Tetsuya Yoshida

Avish Ashok Bharwani

Hirohiko Goto

Shigeki Ono

Simon Jeyapalan

Mark Tang

Thomas Miu

Eric Chan

A control unit of a substrate conveying robot makes a robot arm and a substrate holding device execute a blade member advancing operation, a substrate receiving operation, and a substrate placing operation. The substrate holding device is configured to be capable of being switched between a first working state that a pair of blade members are arranged in the vertical direction and a second working state that a pair of blade members are arranged in a position out of the vertical direction and a single blade member can be advanced into a substrate placing structure.

Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction

The present disclosure is directed to methods and systems for evaluating wafer size handling capabilities of wafer handling robots and wafer stations in a wafer processing environment. In one embodiment, a method is provided in which size parameters for each of one or more wafer stations and one or more robot hands of a wafer handling robot are set based on user input. A user command identifying a desired robot hand and a desired wafer station is received. A first size parameter of the desired robot hand is compared to a second size parameter of the desired wafer station. If the first size parameter is equal to the second size parameter, or if the second size parameter is an all-size parameter, the user command is executed. If the first size parameter is not equal to the second size parameter, an error is generated.

Method of wafer system interlock for the protection of equipment and product in semiconductor processing bridge tool

In a searching step, a laser beam by a laser beam projector is projected toward an object to be detected, which is previously disposed at a delivery position, while moving a holding member which is positioned apart from the object to be detected. In a delivery position data acquiring step, delivery position data is acquired by obtaining member position data provided by a member position data detecting unit when a laser beam reflected by the object to be detected is received by a laser beam receiver and calculating the delivery position data based on the member position data obtained by the member position data detecting unit.

Method and system for acquiring delivery position data of carrying apparatus

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San Jose, CA, United States of America

Shinya Kitano