Kawasaki Jukogyo Kabushiki Kaisha

Shinya Kinoshita

Takayuki Fukushima

Tetsuya Yoshida

Ryosuke Kanamaru

Yasuhiko Hashimoto

Daiki Miyagawa

Shogo Matsuoka

Hiroyuki Okada

A substrate transfer device includes a manipulator, a substrate gripping hand, an actuator configured to rotate the substrate gripping hand about a roll axis, and a controller adapted to operate the manipulator to hold a substrate by a first engaging member and a second engaging member of the substrate gripping hand, then operate the actuator so that a first principal surface of the substrate is located above a base member, and a normal line of the first principal surface is oriented downward from a horizontal plane, and move a movable guiding member toward the tip-end part of the base member so that the second engaging member, a third engaging member, and the movable guiding member grip the substrate.

Substrate transfer device and method of operating the same

Substrate holding hand including a base plate spreading from base toward tip end sides, part of base plate located at base end side, fixed to hand tip portion, holding position at base plate, engaging claw at part of base plate located at tip end side, engaging claw configured to engage part of edge of substrate in vertical or inclined postures, part of edge located lower than center of substrate, moving portion at base end side of holding position and configured to move toward tip end side, and plurality of rotating bodies at the moving portion, being pressed by movement against edge of substrate located lower than holding position and engaged with claw, and plurality of rotating bodies pushing substrate upward holding position while rotating along edge of substrate.

Substrate holding hand and substrate conveying apparatus

A substrate gripping hand which grips a substrate with a disc shape, includes a base plate, and a guide member provided at the base plate, and having a L-shape when viewed from a horizontal direction, the guide member having a shape in which a base end portion of a bottom surface has a horizontal portion and a first corner portion which is a corner portion formed by the bottom surface and an inner wall surface has a curve line shape.

Substrate gripping hand and substrate transfer device including this substrate gripping hand

A substrate conveying apparatus includes: a substrate grasping hand; a first holding member provided at a tip end portion of the substrate grasping hand and including a plurality of first jaw portions; a second holding member provided at a base end portion of the substrate grasping hand and including a plurality of second jaw portions; a first sensor provided at the base end portion of the substrate grasping hand and configured to emit light or ultrasound and detect substrates; and a controller configured to make the first sensor emit the light or the ultrasound toward spaces each between the adjacent substrates and determine whether or not the substrates are normally held.

Substrate conveying apparatus

The end effector has a first hand and a second hand which can be driven independently from each other. The first hand has a hand body which can be inserted between vertically adjacent substrates stored in a substrate storing portion, holding a substrate immediately above or immediately below the hand body. The second hand has a hand base portion which at least partially advances below a lowermost substrate or above an uppermost substrate of a plurality of substrates stored in a substrate storing portion and a substrate holding means provided to the hand base portion so as to hold two or more substrates including the lowermost substrate or the uppermost substrate. By the end effector, substrates can be conveyed without any problem even when use of a batch conveying type hand is restricted due to the condition on the substrate storing portion side.

Substrate conveying system and method

An end effector has a hand base portion at least a part of which advances below a lowermost substrate or above an uppermost substrate of a plurality of substrates stored in a substrate storing portion, a substrate holding unit provided to the hand base portion so as to hold the two or more substrates including the lowermost substrate or the uppermost substrate, and a protrusion amount change unit for changing a protrusion amount of the substrate holding unit from a reference surface including the surface of the hand base portion opposed to the lowermost substrate or the uppermost substrate. The protrusion amount change unit has a single drive source applying a drive force to the whole substrate holding unit.

Growing community of inventors

Kobe, Japan

Shinya Kinoshita