Rigaku Corporation

Shinya Kikuta

Kazuhiko Omote

Satoshi Murakami

Makoto Doi

Akihiro Ikeshita

Provided are a total reflection X-ray fluorescence spectrometer and an estimation method which are capable of easily and quickly estimating whether contamination exists on a substrate through use of a machine learning device. The total reflection X-ray fluorescence spectrometer includes: a spectrum acquisition unit configured to acquire a spectrum; and a learning unit which includes an estimation unit configured to generate estimation data on an element contained in contamination on a surface of a substrate in response to input of the spectrum, and for which learning by the estimation unit has been executed based on teacher data including the spectrum for learning and data on the element contained in the contamination on the surface of the substrate which has been used to acquire the spectrum for learning and the estimation data generated when the spectrum for learning is input to the estimation unit.

Total reflection X-ray fluorescence spectrometer and estimation method

Provided is an energy-dispersive X-ray fluorescence spectrometer capable of easily determining reliability of a result of quantitative analysis and quickly recognizing an abnormality in measurement conditions, an X-ray fluorescence spectrometer, a sample, preprocessing for the sample, or the like. The energy-dispersive X-ray fluorescence spectrometer includes: a spectrum acquisition unit configured to acquire a spectrum; a calculation unit configured to execute quantitative analysis for an element included in the sample based on a peak included in the spectrum; and an evaluation unit configured to calculate a plurality of evaluation values obtained using different calculation methods for a series of processes, being the process of acquiring the spectrum by the spectrum acquisition unit, and the process of executing the quantitative analysis by the calculation unit, and to calculate a comprehensive evaluation value obtained by composing the plurality of evaluation values.

Energy dispersive x-ray fluorescent spectrometer, evaluation method, and evaluation program

The X-ray reflectometer of the present invention includes: an irradiation angle variable unit () configured to vary an irradiation angle of a focused X-ray beam () with a sample surface (); a position sensitive detector () which is fixed; and a reflection intensity calculation unit () configured to, per reflection angle of reflected X-rays () constituting a reflected X-ray beam (), integrate a detected intensity by a corresponding detection element (), for only the detection elements () positioned within a divergence angle width of the reflected X-ray beam () in the position sensitive detector (), in synchronization of variation in the irradiation angle (&#x3b8;) of the focused X-ray beam () by the irradiation angle variable unit ().

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Takatsuki, Japan

Shinya Kikuta