Matsushita Electric Industrial Co., Ltd.

Panasonic Corporation

Panasonic Intellectual Property Management Co., Ltd.

Shintarou Hara

Akira Gyoutoku

Eiji Fujii

Osamu Watanabe

Hideaki Iwanaga

Kazumi Sadamatsu

Hideaki Horio

Isaku Kanno

Takanori Nakano

Yuuji Toyomura

Takafumi Hamano

An actuator includes a piezoelectric layer, a vibration plate, and a reduction inhibition layer. The piezoelectric layer includes an oxide material. The vibration plate is disposed below the piezoelectric layer, and configured to deform when the piezoelectric layer deforms. The reduction inhibition layer is disposed between the piezoelectric layer and the vibration plate, and configured to inhibit reduction reaction in the piezoelectric layer.

Actuator, ink-jet head, and ink-jet device

One objective of the invention is to provide a highly-efficient and reliable piezoelectric thin film device by improving the piezoelectric function of a piezoelectric thin film and obtaining a crystal structure wherein the dependency of a piezoelectric constant, relative to a voltage, is superior, and to also provide a method for manufacturing this piezoelectric thin film device. Another objective of the invention is to provide an inkjet head that satisfactorily exhibits the piezoelectric performance of the piezoelectric thin film device and that has a superior withstand voltage function and driving reliability, and to provide a high quality inkjet recording apparatus on which this inkjet head can be mounted. A piezoelectric thin film device includes: crystal grains that form piezoelectric thin film and grain boundaries that encircle the crystal grains, wherein the same crystal orientation is established for the grain boundaries and the crystal grains.

Piezoelectric thin film device and piezoelectric thin film device manufacturing method, and inkjet head and inkjet recording apparatus

A piezoelectric element includes a pressure chamber member that has an opening communicating with a nozzle, a vibrating plate that is disposed on the pressure chamber member so as to cover the opening, a lower electrode that is disposed on the vibrating plate, a piezoelectric body that is disposed on the lower electrode, an upper electrode that is disposed on the piezoelectric body and in a region opposed to the opening, and a lead electrode that is disposed on the piezoelectric body, that extends from the upper electrode, and that has a width smaller than that of the upper electrode. The piezoelectric body includes a groove portion that is disposed in a predetermined region along an edge portion of the opening and an inactive region (piezoelectric inactive region) that is a region other than the groove portion, that is disposed along the edge portion of the opening, and that does not substantially serve as a piezoelectric element. The lead electrode is disposed in the piezoelectric inactive region.

Piezoelectric element, ink jet head, and ink jet recording device

To provide a piezoelectric thin film having an improved and stable characteristic by controlling stress applied during forming a piezoelectric thin film and providing the piezoelectric thin film having a perovskite structure. A thin film piezoelectric element in which a lower electrode is formed on a substrate, a piezoelectric thin film containing lead is formed on the lower electrode, and an upper electrode is further placed on the piezoelectric thin film, characterized in that the piezoelectric thin film is a dielectric with the perovskite structure having lead, zirconium, and titanium as the main ingredients, and is in a composition region in which, in the composition of the whole piezoelectric thin film, the. Zr/(Zr+Ti) ratio is not less than substantially 0.53, and has a crystal structure of the tetragonal system in which a c axis is longer than an a axis.

Thin film piezoelectric element

The object of the present invention is to provide an organic thin film EL device that has an improved close adherence of a hole injection electrode to an organic thin film layer and a long life, maintaining uniform luminance and minimized performance deterioration over the lapse of time. The organic thin film EL device, which includes an electron injection electrode and a hole injection electrode with an organic thin film layer placed therebetween, has a part or the whole of the hole injection electrode formed of a carbon film. In addition, the carbon film is formed by a sputtering method.

Organic thin film electroluminescent device and its manufacturing method

The object of the present invention is to provide an organic thin film EL device that has an improved close adherence of a hole injection electrode to an organic thin film layer and a long life, maintaining uniform luminance and minimized performance deterioration over the lapse of time. The organic thin film EL device, which includes an electron injection electrode and an hole injection electrode with an organic thin film layer placed therebetween, has a part or the whole of the hole injection electrode formed of a carbon film. In addition, the carbon film is formed by a sputtering method.

Growing community of inventors

Fukuoka, Japan

Shintarou Hara