Asahi Glass Company, Limited

Ag Technology Co., Ltd.

Other

Shinsuke Morikawa

Hidekazu Okamoto

Shin Tatematsu

Shunichi Samejima

Keiichi Ohnishi

Yoshio Oda

Toshihiro Tanuma

Masaru Yoshitake

Keiichi Uchida

Seisaku Kumai

Akihiro Wada

Masaaki Ikemura

Takeshi Morimoto

Hirokazu Takagi

Naoki Yoshida

Kimihiko Sato

Takashi Ohmori

Akira Sekiya

Yasuhisa Furutaka

Hiroshi Otouma

Masami Iwasaki

Yukio Jitsugiri

Makoto Noshiro

Kenroh Kitamura

Toru Shimoyama

Teruo Asano

Naohiro Watanabe

Isao Gotoh

Tetsuya Takagaki

Shigeaki Yonemori

Toru Kamimura

Shunichi Yamashita

Naoko Wada

Tomio Yarita

Norifumi Ohtsuka

Yasuo Hibino

Masaru Yositake

Hideyuki Kurata

Tsuyoshi Takaichi

Yoshio Sato

Disclosed is fluorocarbon-based dry etching gas which is free of global environmental problems and a dry etching method using a plasma gas obtained therefrom. The dry etching gas includes a fluorinated ether of carbon, fluorine, hydrogen and oxygen and having 2-6 carbon atoms.

Dry etching gas

Method for producing dichloropentafluoropropanes

A process for producing 1,1-dichloro-1,2,2,2-tetrafluoroethane, which comprises isomerizing 1,1,2-trichloro-1,2,2-trifluoroethane to form 1,1,1-trichloro-2,2,2-trifluoroethane, followed by fluorination with hydrofluoric acid.

Process for producing 1,1-dichloro-12,2,2-tetrafluoroethane

Method for producing a polyfluoropropionyl halide

A process for preparing 1,1,1,3,3-pentafluoropropane, which comprises reacting 1,1-difluoroethylene with dichlorofluoromethane in the presence of a Lewis acid catalyst to form 1,2,2-trihydrodichlorotrifluoropropane and fluorinating the 1,2,2-trihydrodichlorotrifluoropropane with hydrogen fluoride.

Process for preparing 1,1,1,3,3-pentafluoropropane

A process for producing a hydrogen-containing 2,2-difluoropropane of the following formula (2), which comprises subjecting a 2,2-difluoropropane of the following formula (1) to hydrogen reduction:

Process for producing a hydrogen-containing 2,2-difluoropropane

A process for producing 1,1,1,2-tetrafluoroethane, which comprises reacting 2,2-dichloro-1,1,1,2-tetrafluoroethane, 2-chloro-1,1,1,2-tetrafluoroethane or a mixture thereof with hydrogen in the presence of a hydrogenation catalyst consisting essentially of a Group VIII element as the main component and at least one element selected from the group consisting of Group IB elements, lanthanum and lanthanide elements, as an additional component.

Process for producing 1,1,1,2-tetrafluoroethane

A process for producing chlorofluorobenzenes, which comprises reacting fluorine-containing nitrobenzenes of the following formula (1) with chlorine gas to obtain chlorofluorobenzenes of the following formula (2): ##STR1## wherein n and m are integers satisfying 1.ltoreq.n.ltoreq.3, 0.ltoreq.m.ltoreq.2 and 1.ltoreq.n+m.ltoreq.3.

Process for producing chlorofluorobenzenes

Method for producing a hydrogen-containing chloromethane

A hydrochlorofluoropropane azeotropic or azeotropic-like composition comprising at least two members selected from the group consisting of hydrochlorofluoropropanes of the formula I:

Azeotropic or azeotropic-like composition of hydrochlorofluoropropane

A method for producing methyl chloride, which comprises reacting methanol and hydrogen chloride in a gas phase in the presence of a catalyst, wherein a zirconium oxide catalyst or a composite catalyst comprising at least two oxides of metals selected from the group consisting of Zr, Ti and Al, is used as the catalyst.

Method for producing methyl chloride

A process for producing a 2,2-difluoropropane of the following formula (2), which comprises fluorinating a chlorine-containing 2,2-halogenopropane of the following formula (1) by hydrogen fluoride or a fluorinating agent:

Process for producing a 2,2-difluoropropane

SF.sub.6 is produced by a pyrolysis of SF.sub.5 Cl obtained by a reaction of sulfur or sulfur chloride with chlorine and an amine/hydrogen fluoride complex or a reaction of sulfur tetrafluoride with chlorine and an amine/hydrogen fluoride complex.

Process for producing SF.sub.6 through SF.sub.5 Cl

A process for producing sulfur tetrafluoride comprises reacting in the absence or presence of a solvent an amine/hydrogen fluoride complex having the formula:

Producing sulfur tetrafluoride using amine/hydrogen fluoride complex

Growing community of inventors

Yokohama, Japan

Shinsuke Morikawa