Kanto Denka Kogyo Co., Ltd.

Shinsuke Katayama

Osamu Omae

Go Takikawa

Katsuhiro Saito

Hiroyuki Uehara

Ichiro Morimoto

Norihisa Kimura

Shinji Mita

Hiromi Oya

Yasuyuki Fujiwara

Disclosed is a method for producing phosphorus pentafluoride, including mixing and reacting phosphorus trichloride and chlorine with a large excess of anhydrous hydrogen fluoride liquid, thereby producing phosphorus pentafluoride, wherein heat of reaction generated through the production of phosphorus pentafluoride is removed with latent heat of evaporation of hydrogen fluoride. It is preferable that the anhydrous hydrogen fluoride liquid is circulated, and, in this state, phosphorus trichloride and chlorine are mixed with the anhydrous hydrogen fluoride liquid. Furthermore, it is also preferable that the anhydrous hydrogen fluoride liquid is circulated along a circulation path, or that the anhydrous hydrogen fluoride liquid is circulated through stirring in a reaction vessel.

Method for producing phosphorus pentafluoride

In a method for gas-flow carrying a solid particle, the solid particle includes a solid substance generating a dissociation equilibrium reaction that dissociates at least one type of gas component, and the solid particle is carried by a gas flow containing the gas component. The average particle diameter of the solid particle is preferably 0.1-1.0 mm. The solid particle is preferably carried by the gas flow in the state of a suspended flow, a fluidized flow, or a plug flow. The solid particle preferably includes a solid substance to generate a dissociation equilibrium reaction that dissociates at least one gas component and at least one solid component, and the solid particle is preferably carried by the gas flow in a carrying pipe and the solid particle or the solid component that has adhered to the interior surface of the carrying pipe is removed by the gas flow.

Solid particle carrying method and carrying system

A method for obtaining high-purity phosphorus pentafluoride (PF), which is industrially useful in the fields of semiconductors and batteries, from PFcontaining a gas mixture of HCl, HF, and so on. Specifically, provided is a process for purifying phosphorus pentafluoride including () an immobilization step in which phosphorus pentafluoride containing a mixture is brought into contact with a metal fluoride (MF; M is an n-valent metal) having a specific surface area of 1.0 m/g or more at 40&#xb0; to 150&#xb0; C. to immobilize phosphorus pentafluoride in the form of a hexafluorophosphate (M(PF)), () a separation step in which the mixture remaining in the gas phase is expelled out of the reaction system to separate the mixture from the hexafluorophosphate, and () a heat-decomposition step in which the hexafluorophosphate freed of the mixture is heated at 150&#xb0; to 400&#xb0; C. under a pressure of &#x2212;0.1 to 0.1 MPa&#xb7;G to give phosphorus pentafluoride.

Process for purifying phosphorus pentafluoride

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Okayama, Japan

Shinsuke Katayama