Murata Manufacturing Co., Ltd.

Shinsuke Ikeuchi

Fumiya Kurokawa

Yutaka Kishimoto

Masayuki Suzuki

Katsumi Fujimoto

Seiji Umezawa

Tetsuya Kimura

Kenji Nishiyama

Masanobu Nomura

Yoichi Mochida

Kansho Yamamoto

Hideya Horiuchi

Takuo Hada

Anssi Blomqvist

Ville-Pekka Rytkönen

Matti Liukku

Toshimaro Yoneda

Yoshitaka Matsuki

Nobuyoshi Adachi

Ville Kaajakari

Naoyuki Endo

Yasuhiro Aida

Yuzo Kishi

Ryunosuke Hino

A piezoelectric device includes a membrane portion including a through slot extending through the membrane portion in an up-down direction. A width of the through slot in a single crystal piezoelectric material layer becomes narrower as the through slot extends downward. In the single crystal piezoelectric material layer and a reinforcing layer, a maximum width of the through slot in a layer located on a bottom side is smaller than a minimum width of the through slot in a layer located on a top side.

Piezoelectric device

A piezoelectric device includes a connection section including a first coupling portion, a second coupling portion, and a bridging portion. The first coupling portion extends along a slit and is connected to one of a pair of beam sections. The second coupling portion extends along the slit and is connected to another of the pair of beam sections. The bridging portion is located between the slit and an opening and is connected to both of the first coupling portion and the second coupling portion. The beam sections are connected to each other in a circumferential direction of a base having an annular shape via the connecting section while each of the beam sections is interposed between the slits extending in intersecting directions.

A piezoelectric element includes a piezoelectric layer, a first electrode layer, a second electrode layer, and a connecting electrode. The piezoelectric layer includes first and second surfaces, and a through-hole. The second electrode layer is adjacent to the second surface of the piezoelectric layer. The second electrode layer faces the through-hole. The second electrode layer includes silicon as a major component. The connecting electrode is on a connecting surface of the second electrode layer, and the connecting surface faces the through-hole. The connecting electrode is made of a metal. A surface roughness of the connecting surface is greater than a surface roughness of a major surface. The major surface is a portion, other than the connecting surface, of a surface of the second electrode layer, and the surface is adjacent to the piezoelectric layer.

Piezoelectric element

A piezoelectric element includes a second electrode layer on a second surface of a single-crystal piezoelectric layer. A hole continuous with a through-hole is provided in the second electrode layer. The second electrode layer is made of Pt, Ti, Al, Cu, Au, Ag, Mg, or an alloy including at least one of the metals as a main ingredient. A third electrode layer is on one side of the second electrode layer opposite to the single-crystal piezoelectric layer. The third electrode layer includes at least a portion outside of an edge of the hole with a distance maintained relative to the edge of the hole when viewed in a direction perpendicular or substantially perpendicular to the second surface. The third electrode layer is made of Ni or an alloy including Ni as a main ingredient.

In a piezoelectric device, a layered portion includes, at a position at least above a recess, a single crystal piezoelectric layer and a pair of electrode layers to apply voltage to the single crystal piezoelectric layer. At least a portion of the pair of electrode layers includes a lower electrode layer extending along a surface of the single crystal piezoelectric layer, the surface being closer to a base. The lower electrode layer is present only inside the recess.

A piezoelectric device includes a substrate including a first main surface and a second main surface. A piezoelectric element is on the first main surface. A cover on the first main surface. The cover covers the piezoelectric element and is spaced apart from piezoelectric element on the first main surface side. The piezoelectric element includes a base portion and a membrane portion. The base portion is on the first main surface and has an annular external shape when viewed from the first main surface side. The membrane portion is inside the annular base portion when viewed from the first main surface side. The cover includes a first through hole. The substrate includes a second through hole facing the membrane portion and extends between the first main surface and the second main surface.

Piezoelectric device and acoustic transducer

A piezoelectric device includes a beam portion with a fixed end portion and a free end portion opposite to the fixed end portion. The beam portion extends from the fixed end portion towards the free end portion. The beam portion includes a multilayer body including a piezoelectric layer and first and second electrode layers. A base is connected with the fixed end portion of the beam portion. As viewed from a layering direction of the multilayer body, the base surrounds the beam portion at an interval from the beam portion except for the fixed end portion. As viewed from the layering direction, an average of a dimension of a width of the beam portion in an orthogonal or substantially orthogonal direction to an extension direction of the beam portion is greater than a maximal dimension of a length thereof in the extension direction.

A piezoelectric device includes an outer base, a protruding base, and only one cantilevered portion. A protruding base includes a protrusion and a tip portion. The protrusion protrudes from an internal circumferential surface of the outer base toward a center of a ring shape. The tip portion is connected to the protrusion and located at the center. The cantilevered portion is connected to the tip portion, and extends while being spaced apart from the protrusion. The cantilevered portion includes a fixed end portion and a free periphery. The fixed end portion is connected to the tip portion. The free periphery is located along the internal circumferential surface. The protrusion is located between a first end and a second end of the free periphery.

A piezoelectric device includes a substrate, a piezoelectric element, and a lid. The piezoelectric element includes a base portion and a membrane portion. The base portion is on a first main surface and has an annular outer shape when viewed from a normal direction of the first main surface. The membrane portion is at an inner side portion of the base portion when viewed from the normal direction. The lid is on the first main surface, covers the piezoelectric element, and is spaced apart from the piezoelectric element on the first main surface side. In the substrate, a first through hole extending from the first main surface to a second main surface is facing the membrane portion. The membrane portion includes a through slit.

Piezoelectric device and ultrasonic transducer

A piezoelectric device includes a base portion and an upper layer on an upper side of and supported by the base portion. The upper layer includes a membrane portion that does not overlap with the base portion in plan view. The membrane portion includes at least one piezoelectric layer sandwiched by electrode layers from a top and a bottom thereof. An intermediate layer is between a lower electrode and the base portion. The intermediate layer includes one or more individual layers, and an individual layer exposed as a lower surface of the membrane portion among the one or more individual layers includes a bent portion, which extends from the lower surface of the membrane portion to a lateral wall, on a boundary between a portion defining and functioning as the lower surface of the membrane portion and a portion overlapping with the base portion.

A transducer includes a first connection portion connecting a first tip and a second tip to each other. The first connection portion is surrounded by a split slit connecting a center of the first tip, a center of a base, and a center of the second tip, the first tip, and the second tip.

Transducer

A piezoelectric device includes a membrane portion including a single-crystal piezoelectric layer, an upper electrode layer, and a lower electrode layer. The upper electrode layer is on a first surface. The lower electrode layer is on a second surface facing at least a portion of the upper electrode layer sandwiching the single-crystal piezoelectric layer. The single-crystal piezoelectric layer includes piezoelectric body cleavage directions extending along a boundary line between a cleavage plane occurring when the single-crystal piezoelectric layer is cleaved and the first surface. When viewed in a vertical direction, at least a portion of an upper electrode outer edge and at least a portion of a lower electrode outer edge are non-parallel to at least one of the piezoelectric body cleavage directions.

Piezoelectric device including base portion and membrane portion

In a piezoelectric device, a piezoelectric driving portion includes layers and is directly or indirectly supported by a base portion. The piezoelectric driving portion includes a piezoelectric layer, an upper electrode layer, and a lower electrode layer. The upper electrode layer is disposed on the upper side of the piezoelectric layer. The lower electrode layer faces at least a portion of the upper electrode layer with the piezoelectric layer interposed therebetween. The piezoelectric driving portion includes a through groove extending through the piezoelectric driving portion in the vertical direction, so that a pair of inner side surfaces are provided. The pair of inner side surfaces each include a first small-width portion in which the width of the through groove decreases in a downward direction from an upper end surface of the piezoelectric layer.

An ultrasonic transducer includes first and second acoustic transducers and a housing with a bottomed tubular shape. The second acoustic transducer includes an annular section supporting a second membrane section and contacting an entire periphery of the second membrane section, and an acoustic matching plate facing the second membrane section and spaced apart from the second membrane section. The acoustic matching plate is connected to a surrounding wall portion defining a sealed space with the housing. An ultrasonic transmission path sandwiched between the first membrane section and the second membrane section is provided in the sealed space. A maximum inner width of the ultrasonic transmission path is smaller than a maximum inner width of the surrounding wall portion.

Ultrasonic transducer

A piezoelectric device includes a connecting section connecting a pair of beam sections adjacent to each other. The connecting section is connected to one of the pair of beam sections at a first end portion. The connecting section is connected to another of the pair of beam sections at a second end portion. The second end portion faces the first end portion in a direction in which the pair of beam sections are aligned. A second coupling portion is located along a first coupling portion. The connecting section includes only one first end portion. The connecting section includes only one second end portion. Each of the first end portion and the second end portion is closer to a tip end portion than to a fixed end portion of each of the pair of beam sections.

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Nagaokakyo, Japan

Shinsuke Ikeuchi