Hitachi, Ltd.

Shinobu Otsuka

Makoto Kato

Osamu Yamada

Fuminobu Komura

Koichi Homma

Toshihiro Furuya

Toshihiko Wada

Console for measurement scanner for semi-conductor

An image generated by the detected signals of a scanning electron microscope is divided, for example, into a plurality of rectangular small areas with the boundaries parallel to the y-axis. The relative height in the boundary is obtained by conducting one dimensional integration for respectively boundaries. Thereafter, the relative height difference between the boundaries is determined by conducting one dimensional integration for each area in the direction perpendicular to the boundary. Thereby, the surface three dimensional topography having less distortion can be measured, even in case errors are included in the normal distribution which indicates the surface topography of the specimen, by adjusting and determining the height in the area by the interporating operation.

Scanning electron microscope and method of processing the same

Growing community of inventors

Katsuta, Japan

Shinobu Otsuka