Hitachi, Ltd.

Shinobu Ezaki

Masaie Tokai

Yukishige Kamino

Minoru Kuroiwa

Masaie Tohkai

A continuous vacuum processing apparatus has at least one preliminary vacuum chamber respectively disposed in front of and rear of a vacuum processing chamber. The preliminary vacuum chamber is provided with a slit-shaped seal for sealing the vacuum processing chamber from outside. The preliminary vacuum chamber which is located closest to the atmosphere is provided with an adjusting valve for adjusting the evacuation rate. Alternatively, the preliminary vacuum chamber which is located closest to the atmosphere is shorter that other preliminary vacuum chambers.

Continuous vacuum processing apparatus

A continuous vacuum processing apparatus has a vacuum processing chamber and at least one auxiliary vacuum chamber connected to at least one of the upstream and downstream ends of the vacuum processing chamber as viewed in the direction of flow of a material to be processed. The apparatus further has a slit-type seal device provided in the auxiliary vacuum chamber and capable of conveying the material to be processed while sealing the vacuum processing chamber from exterior of the vacuum processing chamber. The seal device is provided with a guide member for guiding the material. Independent tensioning devices are provided in the vacuum processing chamber and the auxiliary vacuum chamber and capable of independently applying tensions to the portions of the material in the vacuum processing chamber and auxiliary vacuum chamber, so that a material which is not resistant to heat can be processed without being damaged.

A continuous vacuum processing apparatus including a slit-type sealing portion and a guide roller for guiding an object to be processed. The guide roller is provided at each of the two sides of the sealing portion or at one side thereof. Tension is applied to the object to be processed by another device provided between the guide rollers while the object is being conveyed, so as to enable it to be processed without being damaged.

Growing community of inventors

Ibaraki, Japan

Shinobu Ezaki