Kyocera Corporation

Shinnosuke Nakamura

Hiroshi Katta

Atsuomi Fukuura

A sensor device includes a substrate having a substrate surface, a first IDT electrode, a second IDT electrode, and a waveguide. The first IDT electrode and the second IDT electrode are positioned on the substrate surface. The waveguide is positioned on the substrate surface and between the first IDT electrode and the second IDT electrode. At least one of the first IDT electrode and the second IDT electrode includes a reference electrode and a signal electrode each including a plurality of electrode fingers, the plurality of electrode fingers being arranged in a juxtaposed manner in one direction. A distance between the at least one of the first IDT electrode and the second IDT electrode and the waveguide is shorter than an interval between the reference electrode and the signal electrode in the one direction.

Sensor device

A sensor device includes a substrate having a substrate surface, a first IDT electrode positioned on the substrate surface, a second IDT electrode positioned on the substrate surface, a waveguide, and a protective film. The waveguide is positioned on the substrate surface and between the first IDT electrode and the second IDT electrode. The waveguide includes a first immobilized layer positioned on the substrate surface and a second immobilized layer positioned on the first immobilized layer. The second immobilized layer is positioned inside an outer edge of the first immobilized layer as seen in a plan view.

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Kyoto, Japan

Shinnosuke Nakamura